Elastic recoil detection analysis on the ANSTO heavy ion microprobe
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Date
2002-05
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Publisher
Elsevier
Abstract
The heavy ion microprobe at the Australian Nuclear Science and Technology Organisation is capable of focussing heavy ions with an ME/q2 of up to 100 amu MeV. This makes the microprobe ideally suited for heavy ion elastic recoil detection analysis (ERDA). However, beam currents on a microprobe are usually very small, which requires a detection system with a large solid angle. We apply microbeam heavy ion ERDA using a large solid angle ΔE - E telescope with a gas ΔE detector to layered structures. We demonstrate the capability to measure oxygen and carbon with a lateral resolution of 20 μm, together with determination of the depth of the contamination in thin deposited layers. © 2002 Published by Elsevier Science B.V.
Description
Physical copy held by ANSTO Library at DDC: 530.416/3
Keywords
Ion Microscopes, ANSTO, Heavy ions, Antares Tandem Accelerator, Carbon, Oxygen, Concentration ratio, Ecological concentration, Cross sections
Citation
Siegele, R., Orlic, I., & Cohen, D. D. (2002). Elastic recoil detection analysis on the ANSTO heavy ion microprobe. Paper presented to the 15th International Conference on Ion-Beam Analysis (IBA-15): 12th AINSE Conference on Nuclear Techniques of Analysis (NTA-12), Cairns, Australian 15-20 July 2001. In Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 190(1), 301-305. doi:10.1016/S0168-583X(01)01230-7