Elastic recoil detection analysis on the ANSTO heavy ion microprobe

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dc.contributor.authorSiegele, Ren_AU
dc.contributor.authorOrlic, Ien_AU
dc.contributor.authorCohen, DDen_AU
dc.date.accessioned2025-01-24T02:13:54Zen_AU
dc.date.available2025-01-24T02:13:54Zen_AU
dc.date.issued2002-05en_AU
dc.date.statistics2025-01-24en_AU
dc.descriptionPhysical copy held by ANSTO Library at DDC: 530.416/3en_AU
dc.description.abstractThe heavy ion microprobe at the Australian Nuclear Science and Technology Organisation is capable of focussing heavy ions with an ME/q2 of up to 100 amu MeV. This makes the microprobe ideally suited for heavy ion elastic recoil detection analysis (ERDA). However, beam currents on a microprobe are usually very small, which requires a detection system with a large solid angle. We apply microbeam heavy ion ERDA using a large solid angle ΔE - E telescope with a gas ΔE detector to layered structures. We demonstrate the capability to measure oxygen and carbon with a lateral resolution of 20 μm, together with determination of the depth of the contamination in thin deposited layers. © 2002 Published by Elsevier Science B.V.en_AU
dc.identifier.booktitleIon beam analysis : incorporating the AINSE Conference on Nuclear Techniques of Analysis : proceedings of the Fifteenth International Conference on Ion Beam Analysis, incorporating the Proceedings of the Twelfth AINSE Conference on Nuclear Techniques of Analysis : Cairns, Australia, 15-20 July 2001en_AU
dc.identifier.citationSiegele, R., Orlic, I., & Cohen, D. D. (2002). Elastic recoil detection analysis on the ANSTO heavy ion microprobe. Paper presented to the 15th International Conference on Ion-Beam Analysis (IBA-15): 12th AINSE Conference on Nuclear Techniques of Analysis (NTA-12), Cairns, Australian 15-20 July 2001. In Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 190(1), 301-305. doi:10.1016/S0168-583X(01)01230-7en_AU
dc.identifier.conferenceenddate2001-07-20en_AU
dc.identifier.conferencename15th International Conference on Ion-Beam Analysis (IBA-15): 12th AINSE Conference on Nuclear Techniques of Analysis (NTA-12)en_AU
dc.identifier.conferenceplaceCairns, Australiaen_AU
dc.identifier.conferencestartdate2001-07-15en_AU
dc.identifier.editorsR. G. Elliman and M. C. Ridgwayen_AU
dc.identifier.issn0168-583Xen_AU
dc.identifier.issue1-4en_AU
dc.identifier.journaltitleNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsen_AU
dc.identifier.pagination301-305en_AU
dc.identifier.urihttps://doi.org/10.1016/s0168-583x(01)01230-7en_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/15958en_AU
dc.identifier.volume190en_AU
dc.languageEnglishen_AU
dc.language.isoenen_AU
dc.publisherElsevieren_AU
dc.subjectIon Microscopesen_AU
dc.subjectANSTOen_AU
dc.subjectHeavy ionsen_AU
dc.subjectAntares Tandem Acceleratoren_AU
dc.subjectCarbonen_AU
dc.subjectOxygenen_AU
dc.subjectConcentration ratioen_AU
dc.subjectEcological concentrationen_AU
dc.subjectCross sectionsen_AU
dc.titleElastic recoil detection analysis on the ANSTO heavy ion microprobeen_AU
dc.typeConference Paperen_AU
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