Please use this identifier to cite or link to this item: https://apo.ansto.gov.au/dspace/handle/10238/273
Title: Simple ion implantation system for solar cells
Authors: Kenny, MJ
Bird, JR
Broe, HG
Keywords: Annealing
Ion implantation
Ion sources
Silicon solar cells
Issue Date: Nov-1982
Publisher: Australian Atomic Energy Commission
Citation: Kenny, M. J., Bird, J. R., & Broe, H. G. (1982). A simple ion implantation system for solar cells (AAEC/E549). Lucas Heights, N.S.W.: Australian Atomic Energy Commission Research Establishment, Lucas Heights Research Laboratories.
Abstract: A project has been initiated to investigate simple but effective ion implantation and pulsed annealing techniques for the fabrication of high efficiency silicon solar cells. In particular the method aims to eliminate the mass analyser and associated components from the implanter. A solid feed source is used in a clean ultra high vacuum environment to minimise impurities.
Gov't Doc #: 170
URI: http://apo.ansto.gov.au/dspace/handle/10238/273
ISBN: 0642597545
Appears in Collections:Scientific and Technical Reports

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