Simple ion implantation system for solar cells

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dc.contributor.authorKenny, MJen_AU
dc.contributor.authorBird, JRen_AU
dc.contributor.authorBroe, HGen_AU
dc.date.accessioned2007-11-22T04:18:11Zen_AU
dc.date.accessioned2010-04-30T04:29:36Zen_AU
dc.date.available2007-11-22T04:18:11Zen_AU
dc.date.available2010-04-30T04:29:36Zen_AU
dc.date.issued1982-11en_AU
dc.description.abstractA project has been initiated to investigate simple but effective ion implantation and pulsed annealing techniques for the fabrication of high efficiency silicon solar cells. In particular the method aims to eliminate the mass analyser and associated components from the implanter. A solid feed source is used in a clean ultra high vacuum environment to minimise impurities.en_AU
dc.identifier.citationKenny, M. J., Bird, J. R., & Broe, H. G. (1982). A simple ion implantation system for solar cells (AAEC/E549). Lucas Heights, N.S.W.: Australian Atomic Energy Commission Research Establishment, Lucas Heights Research Laboratories.en_AU
dc.identifier.govdoc170en_AU
dc.identifier.isbn0642597545en_AU
dc.identifier.otherAAEC-E-549en_AU
dc.identifier.placeofpublicationLucas Heights, New South Walesen_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/273en_AU
dc.language.isoen_auen_AU
dc.publisherAustralian Atomic Energy Commissionen_AU
dc.subjectAnnealingen_AU
dc.subjectIon implantationen_AU
dc.subjectIon sourcesen_AU
dc.subjectSilicon solar cellsen_AU
dc.titleSimple ion implantation system for solar cellsen_AU
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