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Title: Simple ion implantation system for solar cells.
Authors: Kenny, MJ
Bird, JR
Broe, HG
Issue Date: Nov-1982
Publisher: Australian Nuclear Science and Technology Organisation
Abstract: A project has been initiated to investigate simple but effective ion implantation and pulsed annealing techniques for the fabrication of high efficiency silicon solar cells. In particular the method aims to eliminate the mass analyser and associated components from the implanter. A solid feed source is used in a clean ultra high vacuum environment to minimise impurities.
ISBN: 0642597545
Appears in Collections:Scientific and Technical Reports

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