Simple ion implantation system for solar cells
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Australian Atomic Energy Commission
Abstract
A project has been initiated to investigate simple but effective ion implantation and pulsed annealing techniques for the fabrication of high efficiency silicon solar cells. In particular the method aims to eliminate the mass analyser and associated components from the implanter. A solid feed source is used in a clean ultra high vacuum environment to minimise impurities.
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Kenny, M. J., Bird, J. R., & Broe, H. G. (1982). A simple ion implantation system for solar cells (AAEC/E549). Lucas Heights, N.S.W.: Australian Atomic Energy Commission Research Establishment, Lucas Heights Research Laboratories.