SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering
Australian Atomic Energy Commission
The average sputtering rate over an incidental Maxwellian distribution is tabulated as a function of temperature in the ADL-1 format. Data for twenty-one target materials is presented together with the laws governing the extrapolation procedure. The nuclides covered are Be C Al Si Sc Ti V Cr Fe Co Ni Cu Zn Zr Nb Mo Rh Ag Ta W and Au.
Boltzmann statistics, Compiled data, Deuteron beams, Plasma, Proton beams, Sputtering
Cook, J. L., & Rose, E. K. (1986). SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering. (AAEC/E623). Lucas Heights. NSW: Research Establishment, Australian Atomic Energy Commission.