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Title: SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering
Authors: Cook, JL
Rose, EK
Keywords: Boltzmann statistics
Compiled data
Deuteron beams
Proton beams
Issue Date: Feb-1986
Publisher: Australian Atomic Energy Commission
Citation: Cook, J. L., & Rose, E. K. (1986). SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering. (AAEC/E623). Lucas Heights. NSW: Research Establishment, Australian Atomic Energy Commission.
Abstract: The average sputtering rate over an incidental Maxwellian distribution is tabulated as a function of temperature in the ADL-1 format. Data for twenty-one target materials is presented together with the laws governing the extrapolation procedure. The nuclides covered are Be C Al Si Sc Ti V Cr Fe Co Ni Cu Zn Zr Nb Mo Rh Ag Ta W and Au.
Gov't Doc #: 958
ISBN: 064259824X
Other Identifiers: AAEC-E-623
Appears in Collections:Scientific and Technical Reports

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