SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering

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dc.contributor.authorCook, JLen_AU
dc.contributor.authorRose, EKen_AU
dc.date.accessioned2007-11-22T04:06:26Zen_AU
dc.date.accessioned2010-04-30T04:42:58Zen_AU
dc.date.available2007-11-22T04:06:26Zen_AU
dc.date.available2010-04-30T04:42:58Zen_AU
dc.date.issued1986-02en_AU
dc.description.abstractThe average sputtering rate over an incidental Maxwellian distribution is tabulated as a function of temperature in the ADL-1 format. Data for twenty-one target materials is presented together with the laws governing the extrapolation procedure. The nuclides covered are Be C Al Si Sc Ti V Cr Fe Co Ni Cu Zn Zr Nb Mo Rh Ag Ta W and Au.en_AU
dc.identifierAAEC-E-623en_AU
dc.identifier.citationCook, J. L., & Rose, E. K. (1986). SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering. (AAEC/E623). Lucas Heights. NSW: Research Establishment, Australian Atomic Energy Commission.en_AU
dc.identifier.govdoc958en_AU
dc.identifier.isbn064259824Xen_AU
dc.identifier.placeofpublicationLucas Heights, New South Walesen_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/27en_AU
dc.language.isoen_auen_AU
dc.publisherAustralian Atomic Energy Commissionen_AU
dc.subjectBoltzmann statisticsen_AU
dc.subjectCompiled dataen_AU
dc.subjectDeuteron beamsen_AU
dc.subjectPlasmaen_AU
dc.subjectProton beamsen_AU
dc.subjectSputteringen_AU
dc.titleSPUTLIB II - a revised version of the Maxwellian-averaged rates of sputteringen_AU
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