SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering
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Australian Atomic Energy Commission
Abstract
The average sputtering rate over an incidental Maxwellian distribution is tabulated as a function of temperature in the ADL-1 format. Data for twenty-one target materials is presented together with the laws governing the extrapolation procedure. The nuclides covered are Be C Al Si Sc Ti V Cr Fe Co Ni Cu Zn Zr Nb Mo Rh Ag Ta W and Au.
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Citation
Cook, J. L., & Rose, E. K. (1986). SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering. (AAEC/E623). Lucas Heights. NSW: Research Establishment, Australian Atomic Energy Commission.