SPUTLIB - a library of Maxwellian-averaged sputtering coefficients
Loading...
Date
1982-07
Journal Title
Journal ISSN
Volume Title
Publisher
Australian Atomic Energy Commission
Abstract
A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.
Description
Keywords
Beams, Boltzmann statistics, Energy dependence, Sputtering, Scaling laws, Plasma, keV range
Citation
Cook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission.