SPUTLIB - a library of Maxwellian-averaged sputtering coefficients

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dc.contributor.authorCook, JLen_AU
dc.contributor.authorRose, EKen_AU
dc.date.accessioned2007-11-22T04:18:13Zen_AU
dc.date.accessioned2010-04-30T04:29:37Zen_AU
dc.date.available2007-11-22T04:18:13Zen_AU
dc.date.available2010-04-30T04:29:37Zen_AU
dc.date.issued1982-07en_AU
dc.description.abstractA general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.en_AU
dc.identifierAAEC-E-541en_AU
dc.identifier.citationCook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission.en_AU
dc.identifier.govdoc171en_AU
dc.identifier.isbn0642597480en_AU
dc.identifier.placeofpublicationLucas Heights, New South Walesen_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/274en_AU
dc.language.isoen_auen_AU
dc.publisherAustralian Atomic Energy Commissionen_AU
dc.subjectBeamsen_AU
dc.subjectBoltzmann statisticsen_AU
dc.subjectEnergy dependenceen_AU
dc.subjectSputteringen_AU
dc.subjectScaling lawsen_AU
dc.subjectPlasmaen_AU
dc.subjectkeV rangeen_AU
dc.titleSPUTLIB - a library of Maxwellian-averaged sputtering coefficientsen_AU
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