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Title: SPUTLIB - a library of Maxwellian-averaged sputtering coefficients.
Authors: Cook, JL
Rose, EK
Issue Date: Jul-1982
Publisher: Australian Nuclear Science and Technology Organisation
Abstract: A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.
ISBN: 0642597480
Appears in Collections:Scientific and Technical Reports

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