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ANSTO Publications Online >
ANSTO Publications >
Scientific and Technical Reports >
Please use this identifier to cite or link to this item:
http://apo.ansto.gov.au/dspace/handle/10238/274
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| Title: | SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. |
| Authors: | Cook, JL Rose, EK |
| Issue Date: | Jul-1982 |
| Publisher: | Australian Nuclear Science and Technology Organisation |
| Abstract: | A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format. |
| URI: | http://apo.ansto.gov.au/dspace/handle/10238/274 |
| ISBN: | 0642597480 |
| Appears in Collections: | Scientific and Technical Reports |
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