Please use this identifier to cite or link to this item: https://apo.ansto.gov.au/dspace/handle/10238/48
Title: Search for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and silicon
Authors: Lawson, EM
Williams, JS
Chivers, DJ
Short, KT
Appleton, BR
Keywords: Rutherford scattering
Backscattering
Physical radiation effects
Germanium
Silicon
Ion channeling
Issue Date: Sep-1983
Publisher: Australian Atomic Energy Commission
Citation: Lawson, E., Williams, J. S., Chivers, D. J., Short, K. T., & Appleton, B. R. (1983). Search for an anomalous near-surface yield deficit in rutherford backscattering spectra from implanted germanium and silicon (AAEC/E573). Lucas Heights, N.S.W.: Australian Atomic Energy Commission, Research Establishment.
Abstract: Rutherford backscattering and channelling analysis of high-dose room-temperature ion-implanted germanium has revealed an anomalous near-surface yield deficit. Implant dose and species dependencies and the effect of annealing have been examined. A marked loss of implanted impurity was also noted. The yield deficit is attributed to the absorption of oxygen and other light mass contaminants into a highly porous implanted layer upon exposure to air. Loss of implant species is attributed to enhanced sputtering effects.
Gov't Doc #: 979
URI: http://apo.ansto.gov.au/dspace/handle/10238/48
ISBN: 0642597847
Appears in Collections:Scientific and Technical Reports

Files in This Item:
File Description SizeFormat 
AAEC-E-573.pdf327.82 kBAdobe PDFThumbnail
View/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.