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ANSTO Publications Online >
ANSTO Publications >
Scientific and Technical Reports >
Please use this identifier to cite or link to this item:
http://apo.ansto.gov.au/dspace/handle/10238/48
|
| Title: | Search for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and silicon. |
| Authors: | Lawson, EM Williams, JS Chivers, DJ Short, KT Appleton, BR |
| Issue Date: | Sep-1983 |
| Publisher: | Australian Nuclear Science and Technology Organisation |
| Abstract: | Rutherford backscattering and channelling analysis of high-dose room-temperature ion-implanted germanium has revealed an anomalous near-surface yield deficit. Implant dose and species dependencies and the effect of annealing have been examined. A marked loss of implanted impurity was also noted. The yield deficit is attributed to the absorption of oxygen and other light mass contaminants into a highly porous implanted layer upon exposure to air. Loss of implant species is attributed to enhanced sputtering effects. |
| URI: | http://apo.ansto.gov.au/dspace/handle/10238/48 |
| ISBN: | 0642597847 |
| Appears in Collections: | Scientific and Technical Reports |
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