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Title: Search for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and silicon.
Authors: Lawson, EM
Williams, JS
Chivers, DJ
Short, KT
Appleton, BR
Issue Date: Sep-1983
Publisher: Australian Nuclear Science and Technology Organisation
Abstract: Rutherford backscattering and channelling analysis of high-dose room-temperature ion-implanted germanium has revealed an anomalous near-surface yield deficit. Implant dose and species dependencies and the effect of annealing have been examined. A marked loss of implanted impurity was also noted. The yield deficit is attributed to the absorption of oxygen and other light mass contaminants into a highly porous implanted layer upon exposure to air. Loss of implant species is attributed to enhanced sputtering effects.
ISBN: 0642597847
Appears in Collections:Scientific and Technical Reports

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