Search for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and silicon

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dc.contributor.authorLawson, EMen_AU
dc.contributor.authorWilliams, JSen_AU
dc.contributor.authorChivers, DJen_AU
dc.contributor.authorShort, KTen_AU
dc.contributor.authorAppleton, BRen_AU
dc.date.accessioned2007-11-22T04:06:53Zen_AU
dc.date.accessioned2010-04-30T04:43:18Zen_AU
dc.date.available2007-11-22T04:06:53Zen_AU
dc.date.available2010-04-30T04:43:18Zen_AU
dc.date.issued1983-09en_AU
dc.description.abstractRutherford backscattering and channelling analysis of high-dose room-temperature ion-implanted germanium has revealed an anomalous near-surface yield deficit. Implant dose and species dependencies and the effect of annealing have been examined. A marked loss of implanted impurity was also noted. The yield deficit is attributed to the absorption of oxygen and other light mass contaminants into a highly porous implanted layer upon exposure to air. Loss of implant species is attributed to enhanced sputtering effects.en_AU
dc.identifier.citationLawson, E., Williams, J. S., Chivers, D. J., Short, K. T., & Appleton, B. R. (1983). Search for an anomalous near-surface yield deficit in rutherford backscattering spectra from implanted germanium and silicon (AAEC/E573). Lucas Heights, N.S.W.: Australian Atomic Energy Commission, Research Establishment.en_AU
dc.identifier.govdoc979en_AU
dc.identifier.isbn0642597847en_AU
dc.identifier.otherAAEC-E-573en_AU
dc.identifier.placeofpublicationLucas Heights, New South Walesen_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/48en_AU
dc.language.isoen_auen_AU
dc.publisherAustralian Atomic Energy Commissionen_AU
dc.subjectRutherford scatteringen_AU
dc.subjectBackscatteringen_AU
dc.subjectPhysical radiation effectsen_AU
dc.subjectGermaniumen_AU
dc.subjectSiliconen_AU
dc.subjectIon channelingen_AU
dc.titleSearch for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and siliconen_AU
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