Delamination of brittle films on polymeric substrates

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dc.contributor.authorLatella, BAen_AU
dc.contributor.authorIgnat, Men_AU
dc.contributor.authorTriani, Gen_AU
dc.date.accessioned2023-11-03T04:03:02Zen_AU
dc.date.available2023-11-03T04:03:02Zen_AU
dc.date.issued2005-02-16en_AU
dc.date.statistics2023-09-14en_AU
dc.description.abstractMiniaturisation in microelectromechanical systems (MEMS) and continuing advances in fabrication of functional and complex thin film structures approaching the nanoscale has seen adhesion and mechanical stability as key issues. The reliability of thin film-substrate systems when subjected to externally applied stresses is strongly influenced by the intrinsic film properties and the associated interfacial adhesion characteristics. Accordingly, understanding the fracture damage and adhesion performance of thin films to applied stresses is crucial. Using micro-mechanical in-situ tensile experiments it is possible to detect and analyse the critical conditions for cracking and decohesion of the thin film. In this work it will be shown that these types of experiments offer new insights into evaluating mechanical response and interfacial adhesion using a titanium oxide thin film on polycarbonate as the model system. © 2005 Engineers Australiaen_AU
dc.identifier.booktitleAdvances in applied mechanics : proceedings of the 4th Australasian Congress on Applied Mechanicsen_AU
dc.identifier.citationLatella, B. A., Ignat, M., & Triani, G. (2005). Delamination of brittle films on polymeric substrates. Presentation to the 4th Australasian Congress on Applied Mechanics, Melbourne, Australia, 16-18 February 2005. In Y. M. Xie, A. P. Mouritz, A. Afaghi Khatibi, C. Gardiner & W. K. Chiu (Eds), Advances in applied mechanics : proceedings of the 4th Australasian Congress on Applied Mechanics, Melbourne, Australia, 16-18 February 2005, (pp. 371-376). Barton, ACT: Engineers Australiaen_AU
dc.identifier.conferenceenddate2005-02-18en_AU
dc.identifier.conferencename4th Australasian Congress on Applied Mechanics (ACAM2005)en_AU
dc.identifier.conferenceplaceMelbourne, Victoria, Australiaen_AU
dc.identifier.conferencestartdate2005-02-16en_AU
dc.identifier.editorsY. M. Xie, A. P. Mouritz, A. Afaghi Khatibi, C. Gardiner & W. K. Chiuen_AU
dc.identifier.isbn1876855231en_AU
dc.identifier.pagination371-376en_AU
dc.identifier.placeofpublicationBarton, ACTen_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/15168en_AU
dc.language.isoenen_AU
dc.publisherEngineers Australiaen_AU
dc.subjectPolymersen_AU
dc.subjectSubstratesen_AU
dc.subjectThin Filmsen_AU
dc.subjectLayersen_AU
dc.subjectFabricationen_AU
dc.subjectFracture mechanicsen_AU
dc.subjectCrackingen_AU
dc.titleDelamination of brittle films on polymeric substratesen_AU
dc.typeConference Abstracten_AU
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