Delamination of brittle films on polymeric substrates
Loading...
Date
2005-02-16
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Engineers Australia
Abstract
Miniaturisation in microelectromechanical systems (MEMS) and continuing advances in fabrication of functional and complex thin film structures approaching the nanoscale has seen adhesion and mechanical stability as key issues. The reliability of thin film-substrate systems when subjected to externally applied stresses is strongly influenced by the intrinsic film properties and the associated interfacial adhesion characteristics. Accordingly, understanding the fracture damage and adhesion performance of thin films to applied stresses is crucial. Using micro-mechanical in-situ tensile experiments it is possible to detect and analyse the critical conditions for cracking and decohesion of the thin film. In this work it will be shown that these types of experiments offer new insights into evaluating mechanical response and interfacial adhesion using a titanium oxide thin film on polycarbonate as the model system. © 2005 Engineers Australia
Description
Keywords
Polymers, Substrates, Thin Films, Layers, Fabrication, Fracture mechanics, Cracking
Citation
Latella, B. A., Ignat, M., & Triani, G. (2005). Delamination of brittle films on polymeric substrates. Presentation to the 4th Australasian Congress on Applied Mechanics, Melbourne, Australia, 16-18 February 2005. In Y. M. Xie, A. P. Mouritz, A. Afaghi Khatibi, C. Gardiner & W. K. Chiu (Eds), Advances in applied mechanics : proceedings of the 4th Australasian Congress on Applied Mechanics, Melbourne, Australia, 16-18 February 2005, (pp. 371-376). Barton, ACT: Engineers Australia