Lattice guiding for low temperature crystallization of rhombohedral perovskite-structured oxide thin films
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Date
2010-02
Journal Title
Journal ISSN
Volume Title
Publisher
American Chemical Society
Abstract
Low temperature crystallization of complex oxide thin films has proved to be a challenge with deposition of such materials often carried out at elevated temperatures in excess of 600°C. This article demonstrates one of the first instances of deposition of preferentially oriented strontium-doped lead zirconate titanate thin films at a relatively low temperature of 300°C. This was achieved by carrying out deposition on gold-coated silicon substrates which exert a guiding influence on thin film growth due to similarity in lattice parameters. The microstructure and preferential orientations were studied using high resolution transmission electron microscopy and X-ray diffraction. These results illustrated the pronounced texture in the deposited thin films due to lattice guiding, with crystal structure simulations also verifying the guiding effect. © 2010, American Chemical Society
Description
Keywords
Thin films, Crystallization, PZT, Transmission electron microscopy, X-ray diffraction, Lattice parameters
Citation
Sriram, S., Bhaskaran, M., Mitchell, D. R. G., & Mitchell, A. (2010). Lattice guiding for low temperature crystallization of rhombohedral perovskite-structured oxide thin films. Crystal Growth & Design, 10(2), 761-764. doi:10.1021/cg901165j