Microstructural and compositional analysis of strontium-doped lead zirconate titanate thin films on gold-coated silicon substrates

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dc.contributor.authorSriram, Sen_AU
dc.contributor.authorBhaskaran, Men_AU
dc.contributor.authorMitchell, DRGen_AU
dc.contributor.authorShort, KTen_AU
dc.contributor.authorHolland, ASen_AU
dc.contributor.authorMitchell, Aen_AU
dc.date.accessioned2010-04-08T06:36:19Zen_AU
dc.date.accessioned2010-04-30T05:03:45Zen_AU
dc.date.available2010-04-08T06:36:19Zen_AU
dc.date.available2010-04-30T05:03:45Zen_AU
dc.date.issued2009-02en_AU
dc.date.statistics2009-02en_AU
dc.description.abstractThis article discusses the results of transmission electron microscopy (TEM)-based characterization of strontium-doped lead zirconate titanate (PSZT) thin films. The thin films were deposited by radio frequency magnetron sputtering at 300°C on gold-coated silicon substrates, which used a 15 nm titanium adhesion layer between the 150 nm thick gold film and (100) silicon. The TEM analysis was carried out using a combination of high-resolution imaging, energy filtered imaging, energy dispersive X-ray (EDX) analysis, and hollow cone illumination. At the interface between the PSZT films and gold, an amorphous silicon-rich layer (about 4 nm thick) was observed, with the film composition remaining uniform otherwise. The films were found to be polycrystalline with a columnar structure perpendicular to the substrate. Interdiffusion between the bottom metal layers and silicon was observed and was confirmed using secondary ion mass spectrometry. This occurs due to the temperature of deposition (300°C) being close to the eutectic point of gold and silicon (363°C). The diffused regions in silicon were composed primarily of gold (analyzed by EDX) and were bounded by (111) silicon planes, highlighted by the triangular diffused regions observed in the two-dimensional TEM image. © 2009, Cambridge University Pressen_AU
dc.identifier.citationSriram, S., Bhaskaran, M., Mitchell, D. R. G., Short, K. T., Holland, A. S., & Mitchell, A. (2009). Microstructural and compositional analysis of strontium-doped lead zirconate titanate thin films on gold-coated silicon substrates. Microscopy and Microanalysis, 15(1), 30-35. doi:10.1017/S1431927609090072en_AU
dc.identifier.govdoc1244en_AU
dc.identifier.issn1431-9276en_AU
dc.identifier.issue1en_AU
dc.identifier.journaltitleMicroscopy and Microanalysisen_AU
dc.identifier.pagination30-35en_AU
dc.identifier.urihttp://dx.doi.org/10.1017/S1431927609090072en_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/3118en_AU
dc.identifier.volume15en_AU
dc.language.isoenen_AU
dc.publisherCambridge University Pressen_AU
dc.subjectSiliconen_AU
dc.subjectStrontiumen_AU
dc.subjectTransmission electron microscopyen_AU
dc.subjectPZTen_AU
dc.subjectThin filmsen_AU
dc.subjectMass spectroscopyen_AU
dc.titleMicrostructural and compositional analysis of strontium-doped lead zirconate titanate thin films on gold-coated silicon substratesen_AU
dc.typeJournal Articleen_AU
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