Atomic layer deposition of SIO2 on porous alumina membranes: controlling the pore size and transport properties

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dc.contributor.authorVelleman, Len_AU
dc.contributor.authorTriani, Gen_AU
dc.contributor.authorEvans, PJen_AU
dc.contributor.authorAtanacio, AJen_AU
dc.contributor.authorShapter, JGen_AU
dc.contributor.authorLosic, Den_AU
dc.date.accessioned2020-12-16T21:45:13Zen_AU
dc.date.available2020-12-16T21:45:13Zen_AU
dc.date.issued2008-12-30en_AU
dc.date.statistics2020-12-11en_AU
dc.description.abstractAtomic layer deposition (ALD) of SiO2 onto nanoporous alumina (PA) membranes was investigated with the aim of adjusting the pore size and transport properties. PA membranes from commercial sources with a range of pore diameters (20 nm, 100 nm and 200 nm) were used and modified by atomic layer deposition using tris(tert-butoxy)silanol and water as the precursor couple. By adjusting the number of deposition cycles, the thickness of the conformal silica coating was controlled, reducing the effective pore diameter, and subsequently changing the transport properties of the PA membrane. Silica coated PA membranes with desired pore diameters from <5 nm to 100 nm were fabricated. In addition to the pore size, the transport properties and selectivity of fabricated silica coated PA membranes were controlled by chemical functionalisation using a silane with hydrophobic properties. Structural and chemical properties of modified membranes were studied by dynamic secondary ion mass spectrometry (DSIMS) and scanning electron microscopy (SEM). Spectrophotometric methods were used to evaluate the transport properties and selectivity of silica coated membranes by permeation studies of hydrophobic and hydrophilic organic molecules. The resultant silica/PA membranes with specific surface chemistry and controlled pore size are applicable for molecular separation, cell culture, bioreactors, biosensing and drug delivery. © 2008 Society of Photo-Optical Instrumentation Engineers (SPIE)en_AU
dc.identifier.booktitleProccedings Volume Smart Materials Ven_AU
dc.identifier.citationVelleman, L., Triani, G., Evans, P. J., Atanacio, A., Shapter, J. G., & Losic, D. (2008). Atomic layer deposition of SIO2 on porous alumina membranes: controlling the pore size and transport properties. Paper presented to SPIE Smart Materials, Nano-and Micro Smart Systems, 9-12 Decembr 2008, Melbourne, Australia. In: Voelcker, N. & Thissen, H. (eds), Smart Materials V, SPIE Smart Materials, Nano- & Micro-Smart Systems, Melbourne, December 9-122008, (Vol. 7267, pp. 72670S). doi:10.1117/12.810716en_AU
dc.identifier.conferenceenddate12 December 2008en_AU
dc.identifier.conferencenameSPIE Smart Materials, Nano-and Micro-Smart Systemsen_AU
dc.identifier.conferenceplaceMelbourne, Australiaen_AU
dc.identifier.conferencestartdate9 December 2008en_AU
dc.identifier.editorsVoelcker, N. & Thissen, H.en_AU
dc.identifier.isbn9780819475190en_AU
dc.identifier.pagination72670Sen_AU
dc.identifier.urihttps://doi.org/10.1117/12.810716en_AU
dc.identifier.urihttps://apo.ansto.gov.au/dspace/handle/10238/10111en_AU
dc.identifier.volume7627en_AU
dc.language.isoenen_AU
dc.publisherSPIEen_AU
dc.subjectScanning electron microscopyen_AU
dc.subjectMass spectroscopyen_AU
dc.subjectSilicaen_AU
dc.subjectPorous materialsen_AU
dc.subjectMoleculesen_AU
dc.subjectMembranesen_AU
dc.subjectDepositionen_AU
dc.titleAtomic layer deposition of SIO2 on porous alumina membranes: controlling the pore size and transport propertiesen_AU
dc.typeConference Paperen_AU
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