Heavy ion recoil spectrometry of barium strontium titanate films

Stannard, WB; Johnston, PN; Walker, SR; Bubb, IF; Scott, JB; Cohen, DD; Dyltewski, N

Heavy ion recoil spectrometry of barium strontium titanate films

Date

1995-02-01

Authors

Publisher

Australian Institute of Nuclear Science and Engineering

Abstract

Ferroelectric films are being developed for use in DRAMs. However some commercially promising materials suffer fatigue problems that are likely to be related to stoichiometric changes. Heavy ion recoil spectrometry employing 77 and 98 MeV 127I ions has been used to analyse thin films of barium strontium titanate (BST) at the new heavy ion recoil facility at ANSTO, Lucas Heights. The technique employs a Time of Flight and Energy (TOF-E) detector which enables the determination of separate energy spectra for individual or small groups of elements. Depth profiles for all major elements and carbon have been obtained. Analysis reveals depletion of oxygen in the BST layer next to the platinum electrode and interdiffusion of strontium and oxygen through the layers. Work supported by the Australian Research Council and Australian Institute of Nuclear Science and Engineering.

Description

Physical copy held by ANSTO Library at DDC: 530.416/7

Keywords

Barium compounds, Heavy ion spectrometers, Iodine 127 beams, Ion Spectroscopy, MeV Range 10-100, Recoils, Strontium compounds, Thin Films, Time-of-flight method, Alkaline earth metals, Spectrometers, Transition element compounds

Citation

Stannard, W. B., Johnston, P. N., Walker, S. R., Bubb, I. F., Scott, J. B., Cohen, D. D., & Dytlewski, N. (1995). Heavy ion recoil spectrometry of barium strontium titanate films. Presentation to IBMM-95 : International workshop on applications of ion beam analysis : [proceedings], incorporating the 2nd French-Australian workshop on ion beams, Lucas Heights, Sydney, 1-3 February, 1995, (pp. 105). Lucas Heights, N.S.W. : International workshop on applications of ion beam analysis.