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Browsing Scientific and Technical Reports by Author "Appleton, BR"

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    Search for an anomalous near-surface yield deficit in Rutherford backscattering spectra from implanted germanium and silicon
    (Australian Atomic Energy Commission, 1983-09) Lawson, EM; Williams, JS; Chivers, DJ; Short, KT; Appleton, BR
    Rutherford backscattering and channelling analysis of high-dose room-temperature ion-implanted germanium has revealed an anomalous near-surface yield deficit. Implant dose and species dependencies and the effect of annealing have been examined. A marked loss of implanted impurity was also noted. The yield deficit is attributed to the absorption of oxygen and other light mass contaminants into a highly porous implanted layer upon exposure to air. Loss of implant species is attributed to enhanced sputtering effects.