Ion beam analysis of metal ion implanted surfaces

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dc.contributor.authorEvans, PJen_AU
dc.contributor.authorChu, JWen_AU
dc.contributor.authorDytiewski, Nen_AU
dc.contributor.authorHoffman, Aen_AU
dc.contributor.authorJohnson, EPen_AU
dc.date.accessioned2025-07-31T03:04:18Zen_AU
dc.date.available2025-07-31T03:04:18Zen_AU
dc.date.issued1993-05-17en_AU
dc.date.statistics2025-07-31en_AU
dc.descriptionPhysical copy held by ANSTO Library at DDC: 530.416/15en_AU
dc.description.abstractIon implantation is an established method for altering the surface properties of many materials. While a variety of analytical techniques are available for the characterisation of implanted surfaces, those based on particle accelerators such as Rutherford backscattering (RBS) and nuclear reaction analysis (NRA) provide some of the most useful and powerful for this purpose. Application of the latter techniques to metal ion implantation research at Ansto will be described with particular reference to specific examples from recent studies. Where possible, the information obtained from ion beam analysis will be compared with that derived from other techniques such as Energy Dispersive X-ray (EDX) and Auger spectroscopies.en_AU
dc.identifier.booktitleProceedings of the First French - Australian workshop on the applications of ion beam analysis, 17-21 May 1993, Saclayen_AU
dc.identifier.citationEvans, P. J., Chu, J. W., Dytlewski, N., Hoffman, A., & Johnson, E. P. (1993). Ion beam analysis of metal ion implanted surfaces. The ANTARES AMS Centre at the Lucas Heights Research Laboratories. Paper presented to the First French - Australian Workshop on the Applications of Ion beam Analysis, 17-21 May 1993, Saclay, (pp. 47-61). In Frontier, J. P., Trochon, J., & Trocellier, P. (1993). Proceedings of the first French - Australian workshop on the applications of ion beam analysis, 17-21 May 1993, Saclay. Saclay, France : INSTN Institut national des sciences et techniques nucléaires.en_AU
dc.identifier.conferenceenddate1993-05-21en_AU
dc.identifier.conferencenameFirst French - Australian Workshop on the Applications of Ion beam Analysisen_AU
dc.identifier.conferenceplaceSaclay, Franceen_AU
dc.identifier.conferencestartdate1993-05-17en_AU
dc.identifier.editorsFrontier, J. P., Trochon, J., & Trocellier, P.en_AU
dc.identifier.pagination46-61en_AU
dc.identifier.placeofpublicationSaclay, Franceen_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/16378en_AU
dc.language.isoenen_AU
dc.publisherINSTN Institut national des sciences et techniques nucléairesen_AU
dc.subjectAlpha particlesen_AU
dc.subjectAlloysen_AU
dc.subjectAluminium alloysen_AU
dc.subjectCarbonen_AU
dc.subjectCharged Particlesen_AU
dc.subjectChromium ionsen_AU
dc.subjectChemical analysisen_AU
dc.subjectDataen_AU
dc.subjectHelium 3 reactionsen_AU
dc.subjectIon implantationen_AU
dc.subjectIon Scattering Analysisen_AU
dc.subjectNuclear reaction analysisen_AU
dc.subjectOxygen 16 targeten_AU
dc.subjectSurface treatmentsen_AU
dc.subjectTitanium ionsen_AU
dc.subjectTungsten ionsen_AU
dc.subjectNuclear reactionsen_AU
dc.subjectNumerical dataen_AU
dc.titleIon beam analysis of metal ion implanted surfacesen_AU
dc.typeConference Paperen_AU
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