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Fracture toughness of ultra-thin atomic layer deposited alumina films

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dc.contributor.authorLatella, BAen_AU
dc.contributor.authorTriani, Gen_AU
dc.contributor.authorEvans, PJen_AU
dc.date.accessioned2026-02-17T10:12:45Zen_AU
dc.date.issued2007-07-04en_AU
dc.date.statistics2026-01-29en_AU
dc.descriptionPhysical copy held by ANSTO Library at DDC: 620.14/1en_AU
dc.description.abstractThis study investigates the cracking and interfacial adhesion of atomic layer deposited alumina films on as-received and plasma treated polycarbonate substrates when subjected to controlled externally applied stresses. Optical microscopy was used to observe and follow crack evolution and delamination of the alumina film from the substrate during tensile loading with a small mechanical testing device. The strength and toughness of the alumina film (thickness = 140 nm) was determined to be 140 MPa and 0.23 MPa.m1/2, respectively. It is shown that the adhesion of the alumina films was dramatically improved for the plasma pre-treated substrates.en_AU
dc.identifier.booktitleInternational conference and exhibition : materials and austceram 2007en_AU
dc.identifier.citationLatella, B., Triani, G. & Evans. P. (2007). Fracture toughness of ultra-thin atomic layer deposited alumina films. Presentation to the Materials and Austceram 2007 International Conference, 4th - 6th July 2007. Brighton Le Sands, Sydney, Australia: Novotel. In International conference and exhibition : materials and austceram 2007, (pp.48). North Melbourne, Victoria : Materials Australia.en_AU
dc.identifier.conferenceenddate2007-07-06en_AU
dc.identifier.conferencenameMaterials and Austceram 2007 International Conferenceen_AU
dc.identifier.conferenceplaceBrighton Le Sands, Sydney, Australiaen_AU
dc.identifier.conferencestartdate2007-07-04en_AU
dc.identifier.isbn9781876855304en_AU
dc.identifier.pagination48en_AU
dc.identifier.placeofpublicationNorth Melbourne, Australiaen_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/17066en_AU
dc.language.isoenen_AU
dc.publisherMaterials Australiaen_AU
dc.subjectFracturesen_AU
dc.subjectThin Filmsen_AU
dc.subjectPlasmaen_AU
dc.subjectPolycarbonatesen_AU
dc.subjectCracksen_AU
dc.subjectSubstratesen_AU
dc.subjectAdhesionen_AU
dc.titleFracture toughness of ultra-thin atomic layer deposited alumina filmsen_AU
dc.typeConference Abstracten_AU

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