Fabrication, structural characterization and testing of a nanostructured tin oxide gas sensor

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dc.contributor.authorPartridge, JGen_AU
dc.contributor.authorField, MRen_AU
dc.contributor.authorSadek, AZen_AU
dc.contributor.authorKalantar-Zadeh, Ken_AU
dc.contributor.authorDu Plessis, Jen_AU
dc.contributor.authorTaylor, MBen_AU
dc.contributor.authorAtanacio, AJen_AU
dc.contributor.authorPrince, KEen_AU
dc.contributor.authorMcCulloch, DGen_AU
dc.date.accessioned2020-09-01T22:18:28Zen_AU
dc.date.available2020-09-01T22:18:28Zen_AU
dc.date.issued2009-04-07en_AU
dc.date.statistics2020-08-12en_AU
dc.description.abstractA nanostructured SnO 2 conductometric gas sensor was produced from thermally evaporated Sn clusters using a thermal oxidation process. SnO 2 clusters were simultaneously formed in an identical process on a Si 3 N 4 membrane featuring an aperture created by a focused ion beam (FIB). Clusters attached to the vertical edges of the aperture were imaged using a transmission electron microscope. The original morphology of the Sn cluster film was largely preserved after the thermal oxidation process and the thermally oxidized clusters were found to be polycrystalline and rutile in structure. NO 2 gas sensing measurements were performed with the sensor operating at various temperatures between 25degC and 290degC. At an operating temperature of 210degC, the sensor demonstrated a normalized change in resistance of 3.1 upon exposure to 510 ppb of NO 2 gas. The minimum response and recovery times for this exposure were 45 s and 30 s at an operating temperature of 265degC. The performance of the SnO 2 sensor compared favorably with previously published results. Finally, secondary ion mass spectrometry and X-ray photoelectron spectroscopy were used to establish the levels of nitrogen present in the films following exposure to NO 2 gas. © Copyright 2009 IEEEen_AU
dc.identifier.citationPartridge, J. G., Field, M. R., Sadek, A. Z., Kalantar-zadeh, K., Du Plessis, J., Taylor, M. B., Atanacio, A. J., Prince, K. E. & McCulloch, D. G. (2009). Fabrication, structural characterization and testing of a nanostructured Tin oxide gas sensor. IEEE Sensors Journal, 9(5), 563-568. doi:10.1109/JSEN.2009.2016613en_AU
dc.identifier.govdoc9881en_AU
dc.identifier.issn1530-437Xen_AU
dc.identifier.issue5en_AU
dc.identifier.journaltitleIEEE Sensors Journalen_AU
dc.identifier.pagination563-568en_AU
dc.identifier.urihttps://ieeexplore.ieee.org/abstract/document/4812122en_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/9737en_AU
dc.identifier.volume9en_AU
dc.language.isoenen_AU
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en_AU
dc.subjectFabricationen_AU
dc.subjectTestingen_AU
dc.subjectTinen_AU
dc.subjectThermal conductivityen_AU
dc.subjectOxidationen_AU
dc.subjectAperturesen_AU
dc.subjectMass spectroscopyen_AU
dc.titleFabrication, structural characterization and testing of a nanostructured tin oxide gas sensoren_AU
dc.typeJournal Articleen_AU
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