Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition

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dc.contributor.authorMitchell, DRGen_AU
dc.contributor.authorTriani, Gen_AU
dc.contributor.authorZhang, Zen_AU
dc.date.accessioned2010-09-03T02:03:42Zen_AU
dc.date.available2010-09-03T02:03:42Zen_AU
dc.date.issued2008-10-01en_AU
dc.date.statistics2008-10-01en_AU
dc.description.abstractA two stage process (atomic layer deposition, followed by hydrothermal treatment) for producing crystalline titania thin films at temperatures compatible with polymeric substrates (< 130°C) has been assessed. Titania thin films were deposited at 80°C using atomic layer deposition. They were extremely flat, uniform and almost entirely amorphous. They also contained relatively high levels of residual Cl from the precursor. After hydrothermal treatment at 120°C for 1 day, > 50% of the film had crystallized. Crystallization was complete after 10 days of hydrothermal treatment. Crystallization of the film resulted in the formation of coarse grained anatase. Residual Cl was completely expelled from the film upon crystallization. As a result of the amorphous to crystalline transformation voids formed at the crystallization front. Inward and lateral crystal growth resulted in voids being localized to the film/substrate interface and crystallite perimeters resulting in pinholing. Both these phenomena resulted in films with poor adhesion and film integrity was severely compromised. © 2008, Elsevier Ltd.en_AU
dc.identifier.citationMitchell, D. R. G., Triani, G., & Zhang, Z. (2008). Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition. Thin Solid Films, 516(23), 8414-8423. doi:10.1016/j.tsf.2008.04.052en_AU
dc.identifier.govdoc2602en_AU
dc.identifier.issn0040-6090en_AU
dc.identifier.issue23en_AU
dc.identifier.journaltitleThin Solid Filmsen_AU
dc.identifier.pagination8414-8423en_AU
dc.identifier.urihttp://dx.doi.org/10.1016/j.tsf.2008.04.052en_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/2442en_AU
dc.identifier.volume516en_AU
dc.language.isoenen_AU
dc.publisherElsevieren_AU
dc.subjectCrystallizationen_AU
dc.subjectTitanium oxidesen_AU
dc.subjectTransmission electron microscopyen_AU
dc.subjectAbsorptionen_AU
dc.subjectPolymersen_AU
dc.subjectDepositionen_AU
dc.titleHydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer depositionen_AU
dc.typeJournal Articleen_AU
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