Elemental composition of reactively sputtered indium nitride thin films

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dc.contributor.authorSunil, Ken_AU
dc.contributor.authorMo, Len_AU
dc.contributor.authorMotlanen_AU
dc.contributor.authorTansley, TLen_AU
dc.date.accessioned2010-08-23T05:19:47Zen_AU
dc.date.available2010-08-23T05:19:47Zen_AU
dc.date.issued1996-04-15en_AU
dc.date.statistics1996-04-15en_AU
dc.description.abstractIndium nitride (InN) thin films have been grown on a variety of substrates using low-temperature radio frequency reactive sputtering of indium metal in pure nitrogen plasma. Quantitative compositional analyses of the films, carried out using X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectrometry (RBS), suggest that large amounts of oxygen are present in them. The high concentration of oxygen in our films is attributed to the voided microstructure as revealed by cross-sectional scanning electron microscopy. The XPS studies also suggest that the oxygen incorporated into the films is bonded to nitrogen. © 1996, The Japan Society of Applied Physicsen_AU
dc.identifier.citationSunil, K., Mo, L., Motlan, & Tansley, T. L. (1996). Elemental composition of reactively sputtered indium nitride thin films. Japanese Journal of Applied Physics, 35(4A), 2261-2265. doi:10.1143/JJAP.35.2261en_AU
dc.identifier.govdoc2501en_AU
dc.identifier.issn0021-4922en_AU
dc.identifier.issue4Aen_AU
dc.identifier.journaltitleJapanese Journal of Applied Physicsen_AU
dc.identifier.pagination2261en_AU
dc.identifier.urihttp://dx.doi.org/10.1143/JJAP.35.2261en_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/2303en_AU
dc.identifier.volume35en_AU
dc.language.isoenen_AU
dc.publisherThe Japan Society of Applied Physicsen_AU
dc.subjectThin filmsen_AU
dc.subjectIndium nitridesen_AU
dc.subjectSputteringen_AU
dc.subjectX-ray photoelectron spectroscopyen_AU
dc.subjectRutherford backscattering spectroscopyen_AU
dc.subjectOxygenen_AU
dc.titleElemental composition of reactively sputtered indium nitride thin filmsen_AU
dc.typeJournal Articleen_AU
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