Focused ion beam fabrication and IBIC characterisation of a diamond detector with buried electrodes

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dc.contributor.authorOlivero, Pen_AU
dc.contributor.authorForneris, Jen_AU
dc.contributor.authorJakšić, Men_AU
dc.contributor.authorPastuovic, Zen_AU
dc.contributor.authorPicollo, Fen_AU
dc.contributor.authorSkukan, Nen_AU
dc.contributor.authorVittone, Een_AU
dc.date.accessioned2012-04-19T04:44:28Zen_AU
dc.date.available2012-04-19T04:44:28Zen_AU
dc.date.issued2011-10-15en_AU
dc.date.statistics2012-04-19en_AU
dc.description.abstractThis paper reports on the fabrication and characterization of a high purity monocrystalline diamond detector with buried electrodes realized by the selective damage induced by a focused 6 MeV carbon ion beam scanned over a pattern defined at the micrometric scale. A suitable variable-thickness mask was deposited on the diamond surface in order to modulate the penetration depth of the ions and to shallow the damage profile toward the surface. After the irradiation, the sample was annealed at high temperature in order to promote the conversion to the graphitic phase of the end-of range regions which experienced an ion-induced damage exceeding the damage threshold, while recovering the sub-threshold damaged regions to the highly resistive diamond phase. This process provided conductive graphitic electrodes embedded in the insulating diamond matrix; the presence of the variable-thickness mask made the terminations of the channels emerging at the diamond surface and available to be connected to an external electronic circuit. In order to evaluate the quality of this novel microfabrication procedure based on direct ion writing, we performed frontal Ion Beam Induced Charge (IBIC) measurements by raster scanning focused MeV ion beams onto the diamond surface. Charge collection efficiency (CCE) maps were measured at different bias voltages. The interpretation of such maps was based on the Shockley-Ramo-Gunn formalism. (C) 2011 Elsevier B.V. All rights reserved.en_AU
dc.identifier.citationOlivero, P., Forneris, J., Jakšić, M., Pastuovic, Z., Picollo, F., Skukan, N., & Vittone, E. (2011). Focused ion beam fabrication and IBIC characterization of a diamond detector with buried electrodes. Paper presented at the 12th International Conference on Nuclear Microprobe Technology and Applications, 26-30 July 2010, Germany. In Butz, T., Reinhart, T., & Spemann, D. (Eds), Nuclear Instruments & Methods in Physical Research Section B: Beam Interactions with Materials and Atoms, 269(20), 2340-2344. doi:10.1016/j.nimb.2011.02.021en_AU
dc.identifier.conferenceenddate30 July 2010en_AU
dc.identifier.conferencename12th International Conference on Nuclear Microprobe Technology and Applicationsen_AU
dc.identifier.conferenceplaceGermanyen_AU
dc.identifier.conferencestartdate26 July 2010en_AU
dc.identifier.editorsButz, T., Reinhart, T., & Spemann, D.en_AU
dc.identifier.govdoc4066en_AU
dc.identifier.issn0168-583Xen_AU
dc.identifier.issue20en_AU
dc.identifier.journaltitleNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atomsen_AU
dc.identifier.pagination2340-2344en_AU
dc.identifier.urihttp://dx.doi.org/10.1016/j.nimb.2011.02.021en_AU
dc.identifier.urihttp://apo.ansto.gov.au/dspace/handle/10238/4177en_AU
dc.identifier.volume269en_AU
dc.language.isoenen_AU
dc.publisherElsevieren_AU
dc.subjectIon beamsen_AU
dc.subjectElectrodesen_AU
dc.subjectDiamondsen_AU
dc.subjectRadiation detectorsen_AU
dc.subjectFabricationen_AU
dc.subjectEfficiencyen_AU
dc.titleFocused ion beam fabrication and IBIC characterisation of a diamond detector with buried electrodesen_AU
dc.typeConference Paperen_AU
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