Ionisation processes in low pressure N2 plasmas

Simple item page
dc.contributor.authorDonnelly, IJen_AU
dc.contributor.authorRose, EKen_AU
dc.date.accessioned2025-07-09T04:39:56Zen_AU
dc.date.available2025-07-09T04:39:56Zen_AU
dc.date.issued1989-02-06en_AU
dc.date.statistics2024-11-29en_AU
dc.descriptionPhysical copy held at by ANSTO Library at DDC 530.44/16.en_AU
dc.description.abstractThe population densities of N2+, N+, N++ etc. ions that can be obtained by applying RF energy to N2 gas at pressures of about 1 mtorr are of particular interest for plasma immersion ion implantation. A cross-section library for the electron ionisation of nitrogen molecules, atoms and ions has been assembled and used for the derivation of reaction rates assuming a Maxwellian distribution of electron energies. For a range of fixed electron temperatures and filling pressures, the time-evolution of the ionised states and their final steady-state values have been calculated for conditions appropriate to glow discharge plasmas in which the dominant recombination mechanism occurs via the plasma—wall interaction. We have found that there is zero steady-state ionisation below a certain electron temperature Tcl . Between Tcl and a 1 higher temperature Tc2 there are two steady-state solutions possible, one with low and one with high electron density, and above Tc2 only the high density solution exists. The temperatures Tc1 and Tc2 are functions of filling pressure and the plasma confinement time. In typical glow discharge plasmas, only the lower density branch is accessible because of RF power constraints. This limits the electron temperature in such plasmas to the range Tc1< Te< Tc2.en_AU
dc.identifier.booktitle17th AINSE plasma physics conference., 6th - 8th February 1989, Lucas Heights, AINSE Theatre. : Australian Institute of Nuclear Science and Engineeringen_AU
dc.identifier.citationDonnelly, I. J., & Rose, E. K. (1989). Ionisation processes in low pressure N2 plasmas. Presentation to the 17th AINSE plasma physics conference, 6th - 8th February 1989, Lucas Heights, AINSE Theatre, (pp. 66). Lucas Heights, NSW : Australian Institute of Nuclear Science and Engineering.en_AU
dc.identifier.conferenceenddate1989-02-08en_AU
dc.identifier.conferencename17th AINSE plasma physics conferenceen_AU
dc.identifier.conferenceplaceLucas Heights, New South Walesen_AU
dc.identifier.conferencestartdate1989-02-06en_AU
dc.identifier.editorsAINSE Plasma Physics Conference. & Australian Institute of Nuclear Science and Engineeringen_AU
dc.identifier.pagination66en_AU
dc.identifier.placeofpublicationLucas Heights, New South Walesen_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/16286en_AU
dc.language.isoenen_AU
dc.publisherAINSE Plasma Physics Conference. & Australian Institute of Nuclear Science and Engineeringen_AU
dc.subjectIonizationen_AU
dc.subjectPlasma pressureen_AU
dc.subjectPlasmaen_AU
dc.subjectIon implantationen_AU
dc.subjectSteady-state conditionsen_AU
dc.subjectElectronsen_AU
dc.subjectDensityen_AU
dc.subjectGlow Dischargesen_AU
dc.subjectTemperature rangeen_AU
dc.titleIonisation processes in low pressure N2 plasmasen_AU
dc.typeConference Abstracten_AU
Files
License bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
license.txt
Size:
1.63 KB
Format:
Item-specific license agreed upon to submission
Description:
Download
Collections
Conference Publications