Synthesis and characterisation of titanium vanadium nitride thin films

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dc.contributor.authorTaylor, MBen_AU
dc.contributor.authorDavies, KEen_AU
dc.contributor.authorGan, BKen_AU
dc.contributor.authorMcKenzie, DRen_AU
dc.contributor.authorBilek, MMMen_AU
dc.contributor.authorMcCulloch, DGen_AU
dc.contributor.authorLatella, BAen_AU
dc.contributor.authorWilksch, PAen_AU
dc.contributor.authorMcPherson, Men_AU
dc.contributor.authorVan den Brink, RAen_AU
dc.date.accessioned2021-09-08T01:35:23Zen_AU
dc.date.available2021-09-08T01:35:23Zen_AU
dc.date.issued2005-01-31en_AU
dc.date.statistics2021-08-24en_AU
dc.description.abstractMany transition metal nitrides form very hard and wear resistant thin film coatings. Alloying of transition metal nitrides creates the possibility of producing films with even higher hardness and wear resistance. In this paper we look at alloying TiN and VN utilising a dual source pulsed cathodic arc. TiN and VN both form face centred cubic structures, have similar lattice parameters and are completely miscible over the entire range in bulk form . Of interest is the correlation between intrinsic stress, indentation hardness, microstructure and optical properties of Ti(1-x)VxN films over a range of compositions from x = 0 to x = 1. Previous work by Knotek [using magnetron sputtering showed that thin films of Ti(1-x)VxN made using a metal target of 25 atomic percent V and 75 atomic percent Ti showed the best wear resistance in a pin-on-disc test and the highest Vickers microhardness. In this work we vary the ratio of pulses applied to each cathode in the dual source filtered cathodic arc system to change the composition of the resultant film in a controllable manner. In this way, the properties over a range of composition can be evaluated. In addition to hardness, this work will explore the variations in optical properties of the alloys. Nitrides frequently exhibit attractive colours; for instance, the colour of TiN thin films deposited by plasma immersion ion implantation has been found to vary widely with the conditions of deposition. However, little has been published on the optical properties of the Ti(1-x)VxN alloy.en_AU
dc.identifier.citationTaylor, M. B., Davies, K. E., Gan, B. K., McKenzie, D. R., Bilek, M. M. M., McCulloch, D. G., Latella, B. A., Wilksch, P. A., McPherson, M. & Van den Brink, R. A. (2005). Synthesis and characterisation of titanium vanadium nitride thin films. Paper presented to the 29th Condensed Matter and Materials Meeting, "Australian Institute of Physics Sixteenth Biennial Congress", Canberra, 2005, 31 January - 4 February 2005. Retrieved from: https://www.physics.org.au/wp-content/uploads/cmm/2005/31._Taylor_MB_AIP2005(CMMSP).pdfen_AU
dc.identifier.conferenceenddate4 February 2005en_AU
dc.identifier.conferencename29th Condensed Matter and Materials Meeting, 'Australian Institute of Physics Sixteenth Biennial Congress'en_AU
dc.identifier.conferenceplaceCanberra, Australiaen_AU
dc.identifier.conferencestartdate31 January 2005en_AU
dc.identifier.urihttps://www.physics.org.au/wp-content/uploads/cmm/2005/31._Taylor_MB_AIP2005(CMMSP).pdfen_AU
dc.identifier.urihttps://apo.ansto.gov.au/dspace/handle/10238/11631en_AU
dc.language.isoenen_AU
dc.publisherAustralian Institute of Physicsen_AU
dc.subjectAlloy systemsen_AU
dc.subjectAlloysen_AU
dc.subjectFilmsen_AU
dc.subjectMeasuring methodsen_AU
dc.subjectMechanical propertiesen_AU
dc.subjectNitridesen_AU
dc.subjectNitrogen compoundsen_AU
dc.subjectOptical propertiesen_AU
dc.subjectPhysical propertiesen_AU
dc.subjectPnictidesen_AU
dc.subjectTitanium compoundsen_AU
dc.subjectTransition element alloysen_AU
dc.subjectTransition element compoundsen_AU
dc.subjectVanadium compoundsen_AU
dc.titleSynthesis and characterisation of titanium vanadium nitride thin filmsen_AU
dc.typeConference Paperen_AU
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