Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition

Simple item page
dc.contributor.authorJarvis, KLen_AU
dc.contributor.authorEvans, PJen_AU
dc.contributor.authorTriani, Gen_AU
dc.date.accessioned2025-02-06T03:34:20Zen_AU
dc.date.available2025-02-06T03:34:20Zen_AU
dc.date.issued2018-03-15en_AU
dc.date.statistics2025-02-06en_AU
dc.description.abstractAtomic layer deposited (ALD) barrier films have been deposited onto a wide variety of flexible polymeric substrates to determine their effectiveness as moisture barriers for organic electronics. Little research has however been conducted on the contribution of the substrate to the barrier properties. In this study, alumina (Al2O3) barrier films have been deposited onto different polymeric substrates by ALD to investigate the effect of the substrate type and thickness on the water vapour transmission rate (WVTR). 24 nm Al2O3 films were deposited via plasma enhanced ALD onto 75 and 125 μm thick polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates. Half of the substrates were also O2 plasma pre-treated prior to Al2O3 film deposition to determine its effect on the WVTR. The WVTR of the substrates prior to barrier film deposition was measured using tritiated water (HTO) permeation. Prior to barrier film deposition, it was shown that the WVTR decreased as the substrate thickness increased while PEN had a lower WVTR than PET. After Al2O3 barrier film deposition, the WVTR followed the previously observed trend with lower WVTR for thicker substrates and for PEN over PET. The substrates O2 plasma pre-treated prior to barrier film deposition also showed lower WVTRs, which were attributed to surface cleaning and improved film adhesion. The lowest WVTR measured was 3.1 × 10− 3 g·m− 2/day for a 24 nm Al2O3 film deposited onto O2 plasma pre-treated 125 μm PEN. These results demonstrate that the properties of the polymer substrate influence the WVTR even after barrier film deposition and can therefore be used to improve the barrier properties. © 2018 Elsevier B.V.en_AU
dc.description.sponsorshipThe Cooperative Research Centre for Polymers (CRC-P) (Application No: 20110054) is gratefully acknowledged for their funding. This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) and the Biointerface Engineering Hub @ Swinburne, both part of the Victorian Node of the Australian National Fabrication Facility (ANFF), a company established under the National Collaborative Research Infrastructure Strategy, to provide nano and microfabrication facilities for Australia's researchers. The authors would also like to thank Dr. Lachlan Hyde while at the Melbourne Centre for Nanofabrication for his assistance with ALD, Dr. Bill Gong at the University of New South Wales for carrying out the XPS analysis and the Centre for Organic Electronics at the University of Newcastle for providing the 75 μm PET substrate.en_AU
dc.identifier.citationJarvis, K. L., Evans, P. J., & Triani, G. (2018). Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition. Surface and Coatings Technology, 337, 44-52. doi:10.1016/j.surfcoat.2017.12.056en_AU
dc.identifier.issn0257-8972en_AU
dc.identifier.journaltitleSurface and Coatings Technologyen_AU
dc.identifier.pagination44-52en_AU
dc.identifier.urihttps://doi.org/10.1016/j.surfcoat.2017.12.056en_AU
dc.identifier.urihttps://apo.ansto.gov.au/handle/10238/15967en_AU
dc.identifier.volume337en_AU
dc.languageEnglishen_AU
dc.language.isoenen_AU
dc.publisherElsevieren_AU
dc.subjectAluminium oxidesen_AU
dc.subjectPolymersen_AU
dc.subjectCoatingsen_AU
dc.subjectFilmsen_AU
dc.subjectDiffusion barriersen_AU
dc.subjectSubstratesen_AU
dc.subjectChemical vapor depositionen_AU
dc.subjectNanofilmsen_AU
dc.subjectPolyethylenesen_AU
dc.subjectX-ray photoelectron spectroscopyen_AU
dc.titleInfluence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer depositionen_AU
dc.typeJournal Articleen_AU
Files
License bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
license.txt
Size:
1.66 KB
Format:
Plain Text
Description:
Download
Collections
Journal Articles