SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering

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AAEC-E-623.pdf(697.54 KB)
Date
1986-02
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Publisher
Australian Atomic Energy Commission
Abstract
The average sputtering rate over an incidental Maxwellian distribution is tabulated as a function of temperature in the ADL-1 format. Data for twenty-one target materials is presented together with the laws governing the extrapolation procedure. The nuclides covered are Be C Al Si Sc Ti V Cr Fe Co Ni Cu Zn Zr Nb Mo Rh Ag Ta W and Au.
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Keywords
Boltzmann statistics, Compiled data, Deuteron beams, Plasma, Proton beams, Sputtering
Citation
Cook, J. L., & Rose, E. K. (1986). SPUTLIB II - a revised version of the Maxwellian-averaged rates of sputtering. (AAEC/E623). Lucas Heights. NSW: Research Establishment, Australian Atomic Energy Commission.
URI
http://apo.ansto.gov.au/dspace/handle/10238/27
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Scientific and Technical Reports