Formation of energetic heavy ion tracks in polyimide thin films

Abstract

Polyimide thin films have been irradiated with a high energy beam of heavy ions to a fluence of approximately 4 × 1013 ions/cm2. Proton backscattering spectroscopy was used to measure the composition of the films, which showed that oxygen was the element that exhibited the most rapid loss from the film. The gases evolved from the film during polymer modification were monitored using a quadrupole mass spectrometer for residual gas analysis (RGA). The fluence dependence of RGA signals were indicative of multi-step processes of gas release, whereby the passage of an ion through a region of pristine film changes the local molecular structure to one that will more readily form volatile species when subsequent ions pass. © 2013, Elsevier B.V.