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ANSTO Publications Online >
Journal Publications >
Journal Articles >
Please use this identifier to cite or link to this item:
http://apo.ansto.gov.au/dspace/handle/10238/3069
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| Title: | Development and fabrication of cylindrical silicon-on-insulator microdosimeter arrays. |
| Authors: | Lai, NS Lim, WH Ziebell, AL Reinhard, MI Rosenfeld, AB Dzurak, AS |
| Keywords: | Townsend Discharge Microdosimetry Silicon Ion Implantation Computer-Aided Design Cylindrical Configuration |
| Issue Date: | Jun-2009 |
| Publisher: | Institute of Electrical and Electronics Engineers (IEEE) |
| Citation: | Lai, N. S., Lim, W. H., Ziebell, A. L., Reinhard, M. I., Rosenfeld, A. B., & Dzurak, A. S. (2009). Development and fabrication of cylindrical silicon-on-insulator microdosimeter arrays. IEEE Transactions on Nuclear Science, 56(3), 1637-1641. |
| Abstract: | Recent developments in the fabrication and simulation of prototype silicon-on-insulator (SOI) microdosimeter arrays are presented. A new planar array design has been proposed which has a number of advantages over the previous elongated parallelepiped and cylindrical mesa array designs. This novel planar array design, which incorporates a guard ring, is based upon 2500 planar cylindrically shaped p-i-n detectors and was fabricated via dopant diffusion and ion implantation. The dopant-diffused arrays were successfully fabricated and tested using 2 mum and 10-mum- thick SOI substrates. Technology computer-aided design modeling of the ion-implanted structure is presented which includes the electrostatic potential profile, showing possible avalanche signal multiplication around the n+ core of the microdosimeter. The alpha particle charge transient response was simulated to determine the charge collection in the sensitive region. © 2009, Institute of Electrical and Electronics Engineers (IEEE) |
| URI: | http://dx.doi.org/10.1109/TNS.2009.2015317 http://apo.ansto.gov.au/dspace/handle/10238/3069 |
| ISSN: | 0018-9499 |
| Appears in Collections: | Journal Articles |
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