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Title: Attempt to detect electrochemical doping of silicon with arsenic by Rutherford backscattering analysis.
Authors: Tavendale, AJ
Lawson, EM
Issue Date: Feb-1983
Publisher: Australian Nuclear Science and Technology Organisation
Abstract: Rutherford scattering analysis with 2.0 MeV 4He+ ions failed to detect doping of silicon substrates with arsenic following cathodic electroplating. This is in contrast with the claims of J. Antula [J. Appl. Phys., 48:2581, 1977] that electromigration leads to the formation of n-type, arsenic-doped, near-surface layers in silicon. Arsenic was detected only in the surface oxide layer formed during plating. Complementary thermoprobe measurements also showed no doping effects in the silicon substrates.
ISBN: 0642597634
Appears in Collections:Scientific and Technical Reports

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