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Title: Q-switched ruby laser for producing laser-doped contacts to semiconductors.
Authors: Rose, A
Lawson, EM
Issue Date: Aug-1982
Publisher: Australian Nuclear Science and Technology Organisation
Abstract: A description is given of a q-switched ruby laser used for producing laser-doped contacts on semiconductors.Homogenisation of the laser beam and measurement of the output energy are discussed and some attention is given to the problems of sample reflectivity. A brief outline of the laser-doping process is provided, together with recent experimental results and details relating to the production and analysis of the contacts. A preliminary result of defect characteristics after laser irradiation of germanium is also presented.
ISBN: 0642597499
Appears in Collections:Scientific and Technical Reports

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