AUSTRALIAN ATOMIC ENERGY COMMISSION RESEARCH ESTABLISHMENT LUCAS HEIGHTS RESEARCH LABORATORIES SPUTLIB - A LIBRARY OF MAXWELLIAN-AVERAGED SPUTTERING COEFFICIENTS by J.L. COOK E.K. ROSE July 1982 ISBN 0 642 59748 0 AAEC/E541 AUSTRALIAN ATOMIC ENERGY COMMISSION RESEARCH ESTABLISHMENT LUCAS HEIGHTS RESEARCH LABORATORIES SPUTLIB - A LIBRARY OF MAXWELLIAN-AVERAGED SPUTTERING COEFFICIENTS J.L. COOK E.K. ROSE ABSTRACT A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format. AAEC/E-541 National Library of Australia card number and ISBN 0 642 59748 0 The following descriptors have been selected from the INIS Thesaurus to describe the subject content of this report for information retrieval purposes. For further details please refer to IAEA-INIS-12 (INIS: Manual for Indexing) and IAEA-INIS-13 (INIS: Thesaurus) published in Vienna by the International Atomic Energy Agency. BOLTZMANN STATISTICS; COMPILED DATA; DEUTERON BEAMS; ENERGY DEPENDENCE; EV RANGE 100-1000; HELIUM 3 BEAMS; HELIUM 4 BEAMS; KEV RANGE; METALS; PLASMA; PROTON BEAMS; SCALING LAWS; SPUTTERING; TRITON BEAMS CONTENTS 1. INTRODUCTION 2. SEMI-EMPIRICAL LAWS 3. DETAILS OF THE DATA 4. MAXWELL IAN-AVERAGED SPUTTERING COEFFICIENTS 5. CONCLUSIONS 6. REFERENCES 1 1 4 4 6 6 Table 1 Fitted Values of Sputtering Law Parameters Table 2 Interpolated Values of Sputtering Law Parameters Table 3 SPUTLIB - Sputtering Coefficient Library - Nov.81 9 10 11 Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure Figure 1 2 3 4 5 6 7 8 9 10 11 12 Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering Sputtering coefficient coefficient coefficient coefficient coefficient coefficient coefficient coefficient coefficient coefficient coefficient coefficient for for for for for for for for for for for for Be C Ti Fe Co Ni Cu Nb Mo "W Au U 25 26 27 28 29 30 31 32 33 34 35 36 1. INTRODUCTION Many conceptual design studies of fusion reactor performance, such as the INTOR project, are being carried out around the world. A recent review paper by Hershman and Sigmar [1981] gives full details of the effect of impurities in plasmas, and another by Ashby and Hughes [1981] uses the radiation loss evaluation for impurities calculated by Post et al. [1977], together with transport codes, to reach the conclusion that in INTOR, the temperature radial profile will collapse inwards from the wall. Ashby and Hughes claim that the plasma temperature near the wall will be about 200 eV, a temperature at which impurities, particularly those from heavy metals, have quite large radiation losses. It is not clear what wall reflective properties were considered for such losses, but Ashby and Hughes point out that sputtering from the walls and limiters is the main source of impurities which have considerable power rate coefficients. A compilation of sputtering coefficients for the hydrogen and helium isotopes was carried out by Thomas et al. [1979], In the same year, McCracken and Stott [1979] reviewed the semi-empirical theory of sputtering, but unfortunately it can be shown that their quoted spectral law and scaling coefficients do not fit the data at all well, and predict no maximum in the spectral curve, which occurs in almost all of the data around 1 keV. We have used all available data from Thomas et al. [1979] to fit the spectrum and discover the appropriate scaling rules. 2. SEMI-EMPIRICAL LAWS The Thomas et al . evaluations were chosen to fit the elements Be, C, Ti , Fe, Co, Ni , Cu, Mb., Mo, W, Au and U to the rational function (E - ET)S(E) = A (m, ,m ?) - - ^ E >. ET , ...1 2 (E + B)2 ' (1) where S(E) is the sputtering coefficient for incident ion beam energy E, (m1+m (2) nij and n^ are the atomic masses of the elements in the wall and incident beam, respectively, and ACmnv,) is the scaling coefficient. The threshold energy can be obtained directly from the sublimation energy of the wall material, defined as E^, which in turn can be obtained from the relation Es - 0.0435 LH (eV) , (3) where L^ is the latent heat of sublimation, tabulated in the Metals Reference Book [Smithells 1976]. If the latent heat is not tabulated, the following rough approximations can be used: Es~ 2.8 x 10"3 Mp or 1.48 x 10"3 B , (4) where M is the melting point and B is the boiling point in K. We have used the second correlation only for graphite and silicon. It was not possible to find sufficient data to check whether ET (from equation 2(i)) is the experimental threshold, so we have assumed the theoretical value and computed the constants A and B from the fits to the equation - ET = ao + aiE in which 1 aOA = ? =? , B = ? - . al ! The maximum of the spectrum occurs when Emax " B + 2ET ? <6> and the width is so broad that the -fits are very insensitive to B. We observed the correlation where Z]_ is the atomic number of the element in the wall and, with 5 per cent error weighting, obtained the values b0 = -2.5429 , bl = 0.7879 . A rough correlation of T^ with n^ could just as well be found, but for interpolation purposes, equation (7) suffices. We note that the scaling factor Atm-^n^) in equation (1) can be well approximated by the law "c(mo - 1)A(m lsm2) = A(ml5l) e , (8) where c" is an average value over nip n^. For this average, we used the Thomas et al . data for Ti , Fe, Ni , Mo and Au to find c~ = 1.0 (9) Thomas et al . reported old experimental values for S(E) by Kenknight and Wehner [1964] for eighteen elements with 2.33 and 3.5 keV incident H+ ions. Thomas et al . warned that the quoted error of 3 per cent was unrealistic and differed from more recent measurements by factors of two. However, their graphs show quite definite regions: (i) 22 I'Zj <_ 29, (ii) 41 <_ Zj_ <_ 47, and (10) where the scaling law C0+clml Adiy.l) = e (11) holds. For a least squares fit over region (i) for five atoms, we obtain cQ1 = -11.392 , c11 = 0.15362 . (12) Assuming the same slope in region (ii) we found from the accurate Mo data that cQ2 = -18.187 , c12 = cn (13) and similarly, for region (iii), using the Au information, cQ3 = -31.409 , C13 = c11 . (14) 3. DETAILS OF THE DATA As with the ADL-1 library [Clancy et al. 1981], the philosophy on which the necessary sputtering coefficient data library was based is that all experimental information in the library and the fitted law (1) constants should be used only for interpolation and extrapolation when the information is otherwise unavailable. The best fits for E<-, E-r, Y,A and B are displayed in Table 1. The predicted values of A and B for AT, Si, Sc, V, Cr, Zn, Zr, Rh, Ag and Ta are shown in Table 2. The elements Al, Zr and Ta were normalised to the measured value of A(m,,l). The Thomas et al. [1979] compilation shows tables and plots for the sputtering of incident H+, D+, T+, Met and Met ion beams from the elements Be, C, Ti, Fe, Co, Mi, Cu, Nb, Mo, W, Au and U, although sometimes the information is very scanty indeed. The fitted spectra of these elements are given in Figures 1 to 12 on a log-log scale. It is to be noted that at very low energies, the deviation from the experimental values is the largest; we believe that this is both because S(E) is very small in this region and because the predicted values of ET could be in error. The data here are very sensitive to the value of E,.. McCracken and Stott [1979] also give a general curve of S(T), the average value of S(E) over a Maxwellian ion energy distribution, which is appropriate for plasmas. Because of their spectral law, the necessary integral cannot be evaluated analytically. The form of equation (1) can be averaged analytically. 4. MAXUELLIAN-AVERAGED SPUTTERING COEFFICIENTS The integral which has to be evaluated is S(T) = -^-H"/" dE S(E) E*v/T 7E T (15) where T is the temperature of the plasma in keV. This can be written -i ( /?- * ,T rT i )S(T) = -Li'* M dE S(E) ETe-E/T -y dE S(E) E^ e'E/1 > (16) - h-^ Substituting equation (1) into equation (16), we find [after Gradshteyn and Ryzhik 1965] that |~dE S(E) Ee-E/T = A[lJ-ET I* in which , I ij = 4T(5/2) y'^'e4 D_4(z) , (18) \\ = 2^r (3/2) B'Te4 D_3(Z) ' (19) In these equations y = y s z = Y-p , (20) while D (z) is the parabolic cylinder function. This function was tabulated by Abramowitz and Stegun [1965] for 0 _< z ? 5, and can be computed from the recurrence relation [Erde'lyi et al. 1953]. using the first two cases _2 (22) ?? /?" D_2(z) = z D_j(z) - e4 , erfc(x) = -^ / e'* dt ' 7T X For very low temperature, the asymptotic series 2 (23) e D (z) =V _ v(v- 1) + v(vl )(v -2 )(v-3 )(2\2 (24) can be used; higher terms can be found in Erdelyi et al. [1953]. The second integral in equation (16) can be approximated very well by expanding both the exponential term and the denominator into Taylor series and integrating term by term. From this E\n I"/ 2E\ / , VIT T - (25) with a maximum error of around 1 per cent close to threshold. 5. CONCLUSIONS It is considered that the above theory will predict sputtering coefficients for hydrogen and helium ions impinging on metals to reasonable accuracy. The library listing appears in Table 3 for all elements in ADL-1, using the same keV temperature grid as in that library. The library format is self-explanatory. 6. REFERENCES Abramowitz, M. and Stegun, I.A. [1965] - Handbook of Mathematical Functions. Dover Publications, New York, p.702. Ashby, D.E.T.F. and Hughes, M.H. [1981] - Nucl. Fusion, 21:911. Clancy, B.E,, Cook, J.L. and Rose, E.K. [1981] - ADL-1, an atomic data library for use in computing the behaviour of plasma devices including fusion reactors. AAEC/E515. Erdelyi, A., Magnus, W. Oberhettinger, F. and Tricomi, F.G. [1953] - Higher Transcendental Functions, Vol.II, McGraw-Hill, New York, p.122. Gradshteyn, I.S. and Ryzhik, I.M. [1965] - Tables of Integrals, Series and Products, Academic Press, New York, p.319. Hershman, S.P. and Sigmar, D.J. [1981] - Nucl. Fusion, 21:1079. Kenknight, C.E. and Wehner, G.K. [1964] - J. Appl. Phys., 35:322. McCracken, G.M. and Stott, P.E. [1979] - Nucl. Fusion, 19:889. Post, D.E., Jensen, R.V., Tarter, C.B., Grasberger, W.H. and Lokke, W.A. [1977] - Atom. Data Nucl. Data Tables, 20:5. Smithells, C.J. (Ed.) [1976] - Metals Reference Book. Butterworths Scientific Publications, London, p.418. Thomas, E.W., Hawthorne, S.W., Meyer, F.W. and Farmer, B.J. [1979] - Atomic data for controlled fusion research. ORNL-5207/R1. TABLE 1 FITTED VALUES OF SPUTTERING LAW PARAMETERS El ement 4BE + 4BE + 4BE + 12C + 12C + 12C + 22TI + 22TI + 22TI + 22TI + 26FE + 26FE + 26FE + 26FE + 27CO + 27CO + 27CO + 28NI + 28NI + 28NI + 28NI + 29CU * 29CU + 29CU + 41N3 + 41NB + 41NB + 42MO + 42MO + 42MO + 42MO + A2MD + 74W + 74W + 74W + 79AU + 79AU + 79AU + 79AU + 79AU + 92U + 92U + ni2 1 2 3 1 2 4 1 2 3 4 1 2 3 4 1 2 4 1 2 3 4 1 2 4 1 2 4 1 2 3 3 4 1 2 4 1 2 3 3 4 1 4 Es(eV) 3.44 3.44 3.44 7.42 7.42 7.42 4.88 4.88 4.88 4.88 4.14 4.14 4.14 4.14 4.42 4.42 4.42 4.46 4.46 4.46 4.46 3.55 3.55 3.55 7.50 7.50 7.50 6.90 6.90 6.90 6.90 6.90 8.81 8.81 8.81 3.94 3.94 3.94 3.94 3.94 4.76 4.76 ET=ES/Y(I-Y) (keV) 1.49JD-G2 1.4300-02 1. 8470-02 3.6350-02 2.968D-02 3.956D-U2 6.576D-02 3. 7280-02 2.?13D-02 2.3960-02 6.507D-02 3. 6170-02 2. 6760-02 2.2370-02 7.1580-02 3.9650-02 2. 4360-02 7. 1970-02 3.988D-C2 2.9420-02 2.4520-02 6. 1530-02 3.3830-02 2.0490-02 1.844D-C1 9.8460-02 5. 6260-02 1.7490-01 9.3160-02 6. 6070-02 6.6070-02 5. 3020-02 4.1520-01 2.1470-01 1.1520-01 1.985D-C1 1.024D-C1 7.0340-02 7.0340-02 5.4740-02 2.88'30-Cl 7.8260-02 Y 3.619D-C1 5.9720-01 7.524D-01 2.8570-01 4. 9190-01 7.4990-01 8. 0730-02 1. 5490-01 2. 2340-01 2.8470-01 6. 8290-02 1.3190-01 1.9130-01 2.452D-01 6.612C-02 1.2780-01 2.382D-01 6. 6380-02 1. 2830-01 1.863D-01 2.390C-01 6. 1470-02 1.191D-01 2.2300-01 4.246D-f2 8.3070-02 1. 5840-01 4. 11 50-02 8.0560-02i.iasr-oi 1.1 850-01 1.5380-01 2.169C-02 4.2880-02 8.341C-02 2.0260-02 4.008D-02 5.9560-02 5.956D-C2 7. 8080-02 1.6790-02 6. 5360-02 A (keV) 4 .3350-'" 1 7.0500-02 5.054OC1 1. 6720-02 3.3730-01 6.8680-01 1.703C-?2 4.275D-02 1.2090-01 3.395D-~>1 5.223092 1.2240-01 2.497D-M 1.071P+00 1. 2070-01 2.8070-31 3.7480*00 9.7690-02 2. 4 30 0-01 7.5190-01 1.972DOO 1.849D-.:i 5.394^-01 5.1670+00 3.2660-02 8.207P-G2 3.152D+OC 3.18GC-02 6. 5460-02 1. 4320-01 3.268C-01 5.5750-01 4.0120-03 1.7930-01 7.7370-01 3.162C-C1 7.4770-01 1.2520+00 2.570D+00 2.7610+00 3.627D-02 1.5190+0'.? B (keV) ?>.150D + :O 2.325D-M 1.8370-01 4. 3600-'; 1 3.2090-01 1.5850+00 9.S31D-C1 1 .0090 + 00 1.2680+10 1.0240+00 1 .2780+^ 1.056D+OC 1.1280OO 1.7510+00 3.0560+10 2.1920+vO 2.5940+00 1.5130+00 1 .3650 + ^0 1.7970+00 2.0040+1:5 6.6320-71 1. 6320+00 3.2980+033.11^0+-: -3 3. 2520+00 8.5520+00 3.8770 + '.--) 2.1570+00 2.3160+00 2.3b5D+:-0 2.2730+00 2.5340+7; J 3.2190+Cv 5.1340+00s.-; 4 2 ?.?)+?' :? 4.1.-J90+??? 3. 8840+00 4. 342D+V3 3.197D + ",1) 1.8160+?! 2.2390+01 10 TABLE 2 INTERPOLATED VALUES OF SPUTTERING LAW PARAMETERS lement 13AL 13AL 13AL 13AL 14S! 14SI 14SI 14SI 21SC 21SC 21SC 21SC 23V 23V 23V 23V 24CR 24CR 24CR 24CR 3o ZN 30ZN 30ZN 30 ZN 40ZR 40ZR 40ZR 40ZR 45RH 45RH 45RH 45RH 47AG 47AG 47AG 47AG 73TA 73TA 73TA 73TA 4- + 4- 4 + 4- 4- 4- + + 4- 4- 4- 4- 4- + 4- 4- 4- 4- 4- 4- + 4- 4- + 4- + + + 4- 4- 4- + 4- 4- 4- 4- 4- + m2 1 2 3 .'+ 1 2 3 4 1 2 3 4 1 2 34 1 2 3 4 1 2 3 4. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 E.(eV) 4.09 4.09 4.09 4.05 4.6d 4.68 4.68 4.68 3.91 3.91 3.91 3.91 4.88 4.88 4.88 4.88 5.36 5.36 5.36 5.36 1.37 1.37 1.37 1.37 6.36 6.36 6.36 6,36 5.78 5.78 5.78 5.78 1.78 1.78 1.78 1.78 8.13 8.13 8.13 8.13 ET=ES/Y(I-Y) (keV) 3.421D-V2 2.134D-C2 1.7700-02 1.6530-02 4. P 3 9 0-0 2 2.4980-02 2..j55D-r2 1.9020-f2 4.9860-02 2.8500-02 2.1670-r 2 1. 8610-02 6.941D-C2 3.9060-1.2 2.92oD-02 2.t750-02 7.7630-02 4.3580-02 3.2570-02 2.7490-02 2.4370-02 1.3360-02 9.7560-03 3.0510-03 1.538D-C1 8.2170-02 5.6470-02 4.737D-C2 1.5650-01 B. 3000-02 5.8610-02 4.6850-02 5.U37D-C2 2.6650-02 1.8770-02 1.4960-02 3. 7730-01 1.9520-01 1.3440-01 1.0490-C1 Y 1.3880-01 2.5850-01 3.6240-01 4.5GOC-01 1.338D-C1 2,4970-01 3.510C-01 4.3670-01 8.5780-02 1.6420-01 2.362C-01 3e0030-01 7.61CC-U2 1.4630-01 2.116D-01 2.7020-01 7.4610-12 1.4360-01 2.077C-01 2.6550-01 5.9800-02 1.1600-01 1.6900-01 2.174C-01 4.3230-02 3.4540-02 1.2420-01 1.611C-01 3.8420-02 7.5310-02 1.1C9C-01 1. 4420-01 3.6680-02 7.1970-02 1.0610-01 1.3800-01 2.203D-C2 4.3550-02 6.4660-02 8.4690-02 A (keV) 4.5030-02 1.2570-01 3.4610-01 9.2250-01 8.435C-'~<4 2.3250-03 6.3800-03 1.6990-02 1.126002 3.1030-02 8.515D-C-2 2.2670-01 5.044C-02 1.418C-01 3.9170-01 1.046D+nO ? 3.319C-J2 9.1510-02 2.511D-T-1 6.6840-11 2.5930-01 7.150001 1.9620+00 5.2220+00 4.144O02 1.1770-01 3.2620-01 8.7240-r-.! 9.246C-C2 2. 5500-01 6.9960-01 1.8620+CO 1.9820-01 5.4640-C1 1.4990+00 3. 9910+00 1.7780-02 5. 10 20-02 1.4180-01 3.8000-01 B (keV) 2.2940-01 2.5510-31 2.6240-01 2.6480-01 3.2430-71 3.5510-01 3. 6400-01 3.6700-n 9.6790-01 1.0110+00 1.0240+iV.l 1.0300+00 1.0970+00 1.1580+C-3 1. 1770 + 00 1.1860+00 1.1620+^C 1.2300+00 1.252D+CD 1.2620+00 1.7240+00 1.7460+00 1.7530+^0 1.75oO+00 2.1330+^0 2.2760+00 2.323D+00 2.3460+00 2.4290+0^ 2.576D+OJ 2.6250+00 2 .649D + 'H! 2.7580+00 2.805D + 'X> 2.821D + OC, 2.8290+00 3 .4340 + 0')3.7980+OC 3.9200+00 3.979D+OJ r.PUTI.IB - IcMPERATURES IN V I ,a. 6. 4.1. 5. 5.* * 1. 1. 6. 1. 1. 7. 1.* * 1. 5. 5. 1. 8. 2. 2.* 1. 3. 4. 0000-02 0000-02 OOOD-01 0000+00 2000+01 0000+01 0000+02 0000-50 1240-03 8110-03 466D-02 3350-02 2020-03 2980-03 0000-50 4290-02 5330-02 9520-02 3100-03 3760-03 6700-04 0000-50 4970-01 1130-01 1. 4290-01 6. 1. 1. * 1. 3. 7. 3. 1. 5. 6.* * 1. 1. 1. 8. 3. 1. 1. 0340-02 7130-02 9160-03 0000-50 134D-03 1220-03 5470-03 6810-03 2020-04 1730-05 2 9 7 5 1 6 7 1 1 7 1 1 6 9 1 5 5 1 7 2 1 1 3 3 1 5 1 1 1 3 6 3 1 4 4 ,0000-02 .0000-02 .0000-01 .0000+00 .40CD+01 .OOOD+01 .5000+02 SPUTTERI .4490-04 .2760-03 .5460-03 .4850-02 .2800-02 .4530-03 .1190-04 SPUTTERI .2240-02 .6960-02 .2350-02 .6590-02 .3050-03 .0090-03 .7980-04 SPUTTERI .0000-50 .7820-01 .8900-01 .2120-01 .2990-02 .4480-02 .2900-03 SPUTTERI .OOOD-50 .5710-03 .9980-03 .0940-03 .4540-03 .4300-04 .1760-05 11 TABLE 3 SPUTTFRING COEFFICIENT LIBRARY - NOV. KEV (4b ENTRIES) 3, 1. 8e 6. 1. 7. 1. NG 3. 1. 8. 1. 1. 5. 7. NG 2. 5. 4. 1. 6. 1. 1. NG 2. 4. 3. 1. 4. 1. 9. NG 1. 3. 6. 2. 1. 3. 3. SPUTTERING 0000-50 0970-02 8530-02 0170-03 6310-03 0860-03 2590-04 1. 0000-50 1 1 6 3 9 8 .2130-02 .7940-02 .9170-03 .2120-03 .2210-04 .5000-05 5. 1. 1. 6. 2. 8. 6. 0000-02 COOD-01 CCOD-01 OOOD+00 6000+01 0000+01 OOOD+03 COEFFIC 2060-04 4260-03 2060-03 4820-02 227D-02 8540-03 0570-04 COEFFIC 5120-02 9110-02 9650-02 4460-C2 5230-03 7420-03 3570-04 COEFFIC 2620-02 0110-01 6870-01 055D-C1 7290-02 2550-02 7290-04 COEFFIC 0000-50 9540-03 8470-03 7500-03 3470-03 8610-04 1600-05 COEFFIC 9170-04 3120-02 7330-02 0970-03 8840-03 0200-04 4230-05 4.000H-02 2. OOOD-01 9. GOOD- 01 7.0000+00 1.8000+01 8.0000+01 IENT FOR 4.8860-04 2.8170-03 8.801D-C3 1.467D-02 1.178C-02 5.3640-03 IENT FOR 3.439C-02 6.6450-02 4.721D-02 1.284D-02 5.898D-03 1.539P-03 IEMT FOR 1.3070-01 4.8480-01 3. 5030-01 9. 3 550-02 4. 2720-02 1.1080-02 IENT FDR 5.5140-04 6.1100-03 6.684D-03 2.479D-Q3 1. 2270-03 3.4250-04 IENT FOR 3.6390-03 1.8070-02 1.6740-02 5.4610-03 2.6180-03 7.1000-04 5, 3. 1. 8. 2. 9. BE 6. 4. 9. 1. 1. 4. BE 4. 6. 4. 1. 5. 1. BE 2. 4. 3. 8. 3. 9. C 1. 6. 6. 2. 1. 3. C 6. 1. 1. 4. 2. 6. OOOn-02 OOOD-01 OCCO+CC 0000+00 0000+01 0000+01 + H + 5200-04 0710-03 338D-C3 4450-02 1320-02 955D-C3 + 0+ 136D-G2 5100-02 5000-02 155D-C2 3840-03 378D-C3 + 4HE + 09 in -0.1 8140-C1 3360-01 4130-02 898D-02 9220-03 + H + 3690-03 8850-03 5160-03 2600-03 1270-03 0790-04 + 0 + 0410-03 933D-C2 6180-02 9510-03 3990-03 3730-04 8] 6,0000-02 4.0000-01 2.1)000+0? 9.0000+00 3. OOOD+01 l.OCOD+02 8.1210-04 5.2580-03 1.2670-02 1.4190-02 9.4770-03 4.6C7D-03 <*. 6730-02 6.1960-02 3.0930-02 1.0520-02 3.7690-03 1. 2490-03 2.6820-01 4.6010-01 2.2790-01 7.65JO-02 2.7240-02 8. 9860-03 2. 052 0-03 7.1510-03 5.0940-03 2.0780-03 8.0690-04 2.7980-04 7.993D-03 1.9420-02 1.2000-02 4.5330-03 1.7010-03 5.7830-04 7, 5. 3. 1. 4. 2. 9. 5. 1. 1. 3. 2. 5. D ? 2.y. 2. 5. 3. 4. 1. 7. 2. 3. 2. 7. 4. 1. 6. 1. 9. ,1. 9. 4. 1. 2. 0000- ? 2 0000-01 Or''C 0+ JO OOOD+01 DOOD+01 50JO+02 6920-Of 9880-03 4tdD-'J2 3920-02 1720-03 31JO-03 0950-02 8570-02 3840-02 65oO-03 9110-03 221D-J4 13(30- Jl 3540-31 7500-01 .U90-02 1010-02 7510-03 6330-03 1910-03 1730-03 925D-03 3150-04 1940-14 6110-03 9060-02 5810-03 184D-03 3240-03 4470-04 (Continued) 12 ** 1.1. 7. 7. 4. 1. 2.* * 1. 3. 3. 2. 1. 4. SPUTTERING 0000-50 6330-02 6670-02 4970-02 5760-02 7290-02 3660-03 0000-50 9910-04 1950-03 4660-03 3560-03 7050-04 6.0480-05 * 1. 2 . 8. 6. 3. 1. 1.* 1. 5. 1. 1. 8. 3. 4.* * 1. 2. 6. 4. 2. 9. 1. OCOD-50 2230-03 1550-03 1500-03 3850-03 1770-03 516D-04 0000-50 1990-03 8090-02 5300-02 8360-03 1930-03 2300-04 1 1 8 6 4 1 1 1 5 3 2 1 4 4 1 2 8 5 3 1 1 1 6 1 1 8 2 2 .0000-50 .9410-02 .0260-02 .9420-02 .1820-02 .4980-02 .6210-03 SPUTTERI .0000-50 .7600-04 .2850-03 .2290-03 .225C-03 .0460-04 .1210-05 SPUTTEKI .0000-50 .5780-03 .3400-03 .5590-03 .0590-03 .0130-03 .0330-04 SPUTTERI .0000-50 .0120-03 .8680-02 .3990-02 .0260-03 .7560-03 .8900-04 1. 2. 8. 6 . 3. 1. 1. NG 1. 7. 3. 2 . 1. 3. 3. NG 1. 2. 8. 5. 2.a. 7. NG 6. 6. 1. 1. 7. 2. 2. SPUTTERING 0000-50 135D-C2 5450-02 8800-02 6850-02 3390-03 2C4D-03 1 2 6 4 e. 8 8 .0000-50 .3950-02 .6730-02 .4100-02 .4260-02 .0350-03 .2C4D-04 4. 2. 6. 4. 2. 7. 6. * SPUTTERING* 1. 9. 7. 6. OOOD-50 3200-04 2010-03 4570-03 3.7690-03 1. 1. 3710-03 8240-04 1 1 7 5 3 1 1 .0000-50 .3260-03 .5030-03 .9180-03 .4270-03 .1840-03 .2470-04 1. 1. 7. 5. 3. 1. 9. COEFFIC 0000-50 2430-02 2900-02 4580-02 356D-02 3240-02 2360-03 COEFFIC 0000-50 3790-04 3380-03 C350-C3 1190-03 5550-04 131D-G5 COEFFIC JCOD-50 9080-03 4430-03 G 76 0-0 3 7940-03 8970-04 852D-f:5 COEFFIC 6580-C4 3050-03 9070-02 2880-02 3620-03 4280-03 1990-04 COEFFIC 4300-C3 6380-02 7490-02 0270-02 216D-C2 0600-03 234D-C4 COEFFIC OOOD-50 5170-03 7120-03 4620-03 1460-03 0440-03 4890-05 IENT FOR 2. 4250-03 4. 2060-02 8. 4820-02 6.0370-02 3.580D-G2 1.188D-C2 IENT FOR l.OC 00-50 1. 8450-03 3.3650-03 1.874D-C3 l.f-30C-03 3.173D-04 IENT FHR 4.342D-04 5.24CO-03 8.483C-C3 4.675D-03 2. 5740-03 7. 9430-04 IENT FOR 1.7030-03 1.1C9D-02 1.932D-G2 1.1950-02 6. 8070-03 2. 1730-03 IENT FOR 8.5980-03 4.372D-02 6.777D-02 3.709D-02 2.0410-C2 6.303D-C3 IENT FOR l.OOOD-50 3.825D-C3 7.854D-03 5.0730-03 2.9110-03 9.3430-04 C 6. 5. 8. 5 -3. 1. TI 1. 2. 3. 1. 9. 2. TI 9. 6. 8. 4. 2. 7. TI 2. 1. 1. 1. 6. 1. TI 1. 5. 6. 3. 1. 5. FE 1. 5. 7. 4. 2. 8. + 4HE+ 2670-03 5620-02 6210-02 6690-02 344D-C2 C78D-02' + H + OCOD-50 4540-03 3730-03 7390-03 556D-C4 8670-04 + 0 + 7860-04 5560-03 4930-03 337D-C3 387D-C3 179D-04 ?H T + 647D-C3 403D-C2 9460-02 1150-02 3340-03 967D-03 + 4HE+ 2420-02 3560-02 7740-02 4400-02 8940-02 6970-03 + H + 0000-50 2250-03 9460-03 7390-03 7100-03 462D-04 9.8100-03 6.5040-02 8.6920-02 5.3450-02 2.5310-02 9.8720-03 l.OOOD-50 2. 8210-03 3.1070-03 1.6220-03 7. 0620-04 2.6170-04 1. 4840-03 7.3520-03 7.7630-03 4.0480-03 1.7650-03 6. 5530-04 3.532D-03 1.5940-02 1.8580-02 1.0450-02 4.7350-03 1.7990-03 1. 6050-02 5.9510-02 6.1690-02 3.2110-02 1.4010-02 5.2010-03 1.000D-5C 6.1440-03 7.7450-03 4.448D-03 2.C30D-03 7.7380-04 1. 7. 8. 5. 2. 4. 2. 3. 2. 1. 5. 1. 1. 7. 6. 3. 1. 2. 4. 1. 1. 9. 3. 8. 1. 6. 5. 3. 1. 2. 5. 6. 7. 4. 1. 3. 3140-02 1770-02 1120-02 0590-02 0500-02 4510-03 6140-04n 5lD-03 7580-03 5220-03 6?5D--)4 1520-04 969D--J3 8470-03 8810-03 7980-03 409D-D3 8870-04 3770-03 7220-02 6860-02 8460-03 8060-03 0100-04 957D-02 319D-02 4620-02 0120-02 118D-02 2920-03 2270-04 7680-03 0830-03 1940-03 6330-03 4520-04 (Continued) 13 ** 1 6 2i 9 3 4 SPUTTERI ? ? ? e ? ? ? 0000-50 554D-Q3 2260-02 7180-02 548D-Q3 3440-03 3320-04 1 6 2 I 8 2 2 ? tt ? 5 * ? OOOD-50 9770-03 2820-02 557D-02 6360-03 8790-03 .9530-04 NG 1 7 21 7 2 2 ? ? ? a ? ? ?* SPUTTERING *i i 4 3 1 6 8* * 12 1 1 6 2 3 * * 1 3 5 7 5 2 3 * * 1 3 2 2 1 6 9 * * 1 2 1 2 21 I * ? ? ? ? * ? OCOO-50 3620-02 2930-02 3910-02 9070-02 7450-03 8020-04 1 1 4 3 1 5 6 ? * ? ? * ? ? 0000-50 4500-02 4050-02 0800-02 7270-02 8120-03 0040-04SPUTTERI * ? ? * ? ? ? 0000-50 7410-02 0850-01 1010-01 8610-02 6400-02 6630-03 1 3 1 1 6 2 2 .0000-50 ? ? ? ? * ? 1220-02 1380-01 0240-01 2870-02 2920-02 5120-03 2 1 4 2 1 5 4 NG 5 3 I 9 5 2 1 ? ? ? ? ? 0 ? ? ? ? ? ? ? ?SPUTTERING ? ? ? * * ? ? * M ? ? * ? * 0000-50 5510-04 2220-03 9020-03 799D-03 5570-03 9250-04 0000-50 6840-03 0480-02 4320-02 6140-02 5400-03 4250-04 1 5 5 7 5 2 2 I ? ? ? ? ? ? ?s ? 4. 2 2 I 5 6 ? ? ? ? ? 0000-50 3490-04 6830-03 6340-03 413D-C3 247D-03 7170-04 PUTTERI OOQD-50 3740-03 1790-02 2960-02 4900-02 7040-03 4860-04SPUTTERI ? * ? * ? ? ? 0000-50 4660-02 5020-01 7390-01 2600-011100-01 8550-02 1 2 I 2 2 9 I ? e ? ? ? ? ? 0000-50 8360-02 6480-01 7150-01 1390-01 8530-02 2940-02 1 7 6 7 5 2 2 NG 1 5 2 2 1 54 NG 4 3 1 2 2 8 9 ? ? ? * ? ? * * ? ? ? ? * . ? ? ? ? o ? ? COEFFIC 0000-50 8560-03 3140-02 4240-02 8940-03 531D-C3 2450-04 COEFFIC 036D-C3 6060-02 4730-02 8230-02 5800-02 1130-03 5660-04 COEFFIC 9530-03 4940-02 1770-01 5610-02 8070-02 0280-02 9170-03 COEFFIC 0000-50 0690-04 0690-03 3380-03 0770-03 008D-03 0840-04 COEFFIC 0000-50 0440-03 2830-02 1680-02 3840-02 0670-03 9580-04 COEFFIC 5330-03 1980-02 7750-01 6630-01 031D-C1 8760-02 9700-03 IENT FOR 1 1 2 1 7 2 ? ? ? ?? ? ? 3110-03 414C-02 3300-C2 3130-02 2760-03 2600-03 IENT FOR 4 2 4 2 1 4 * ? ? ? ? ? 6650-03 7490-02 509C-02 61 80-02 4580-02 5690-03 IENT FOR 1 6 1 8 5 1 ? ? ? ? ? ? 076D-U2 0780-02 2070-01 9650-02 401D-C2 8210-02 IENT FOR 1 2 6 7 4 1 ? ? ? ? ? * OOOD-5C 2060-03 3930-03 0430-03 7830-03 8180-03 IENT FOR 5 1 2 2 1 4 ? ? ? ? ? ? 6250-04 017D-C2 366C-02 0510-02 2940-02 5630-03 IENT FOR 8 6 1 2 1 8 ? ? ? ? ? ? 8850-03 5060-02 887C-01 5990-01 9320-01 086C-02 FE D + 2.7310-02 4.0500-03 1.7750-02 1.9970-02 2.334D-C2 2.1530-02 1.220P-C2 1.139D-02 6.7540-03 5.0050-03 2.C44D-C3 1.866D-G3 FE T + 7.0610-03 9.3140-03 3.4230-02 3.8450-02 4.5230-02 4.2090-02 2.4260-C2 2.2690-02 1,3550-02 1.0070-02 4.1330-03 3.7760-03 FE 4HP + 1.5230-C2 1.9460-02 7.9040-02 9.2010-02 1.2280-01 1.2570-01 8.4400-02 7.9750-02 5.C520-02 3.8440-02 1.6540-02 1.5160-02 CO +? H4- 1.0000-50 1.000D-5C 3.1550-03 3.9900-03 6.6680-03 7.9160-03 6.7600-03 6.4940-03 4.5230-03 3.5770-03 1.6620-03 1.532D-03 CO + 0 + 1.4190-03 2.215D-03 1.3890-02 1.6680-02 2.4320-C2 2.6390-02 1.9450-02 1.8500-02 1.2150-02 9.3800-03 4.1540-03 3.8160-03 CO 4HE + 1.3020-02 1.7010-02 9.5050-02 1.1400-01 1.9850-01 2.5320-01 2.5300-01 2.4600-01 1.843D-C1 1.5020-01 7.4330-02 6.8830-02 5.3130-03 2.1370-02 1.9170-02 1.0 70!)-02 4.0010-03 8.2390-74 1.1480-02 4-. 1170-.12 3.7690-02 2.1330-02 8.0600-03 1 .6720-03 2.3510-02 1.0150-01 1.183D-01 7.5630-12 3.1230-02 6.8720-03 l.f J3D-5:i 4.6670-03 3.0630-03 6.24'jD-)3 2.9750-03 7. 2 180-04 2.9660-03 1.8820-02 2.5630-02 1.7640-02 7.6890-03 1.7550-03 2.0830-02 1.3340-01 2.704D-J1 2.3910-01 1.2740-01 3. 3 520-02 (Continued) 14 * * 1.0000-30 9.341D-C4 1.0860-02 1.0830-02 6.5830-03 2.4750-03 3.3720-04* * l.OCOO-50 7.5560-03 3.2600-02 2.923D-C2 1.7210-02 6.3150-03 8.4600-04* * l.OOCD-50 1.6690-02 7.274D-02 7.5640-02 4.7540-02 1.8410-02 2.5660-03* # 1.0000-50 3.827D-C2 1.6660-01 1.8390-01 1.1880-C1 4.7C7D-02 6.6750-03 * * 1.0000-50 8.6370-03 5.1C9D-02 3.2350-02 1.6550-02 5.4220-03 6.6950-04* * 1.0000-50 1*3380-02 5.8620-02 5.7880-02 3.554D-C2 1.3500-02 1.8540-03 SPUTTERING COEFFICIENT FOR NI H+ 1.0000-50 1.0000-50 l.OCOD-50 1.0000-50 1.0000-50 1.0000-50 1.4780-03 2.0020-0? 5.3T3D-03 7. 5040-03 9. 0130-03 1.0080-0? 1.1430-02 1.1850-02 1.2160-02 1.238D-C2 1.256D-C2 1.1720-02 1.0020-02 9.3160-03 8.7030-03 8.1690-03 7.6990-03 7.2840-03 6.0140-03 5.5410-03 5.1430-03 4.801D-C3 3.6290-03 2.9360-03 2.1440-03 1,8940-03 1. 6980-03 1,5410-03 1.4110-03 6.351D-04 2.3090-04 1. 7600-04 SPUTTERING COEFFICIENT FOR NI 0+ 1. 00-30-50 1.0000-50 1.0410-03 2.8410-C3 4.4980-03 6.0590-03 9.0180-03 1.0460-02 1.8750-02 2.4410-02 2.8190-02 3.C73D-02 3.3870-02 3.475D-C2 3.5360-02 3. 5750-02 3.4880-02 3.1990-02 2.6840-02 2.481D-C2 2.3C7D-02 2.157D-C2 2.0270-02 1.9130-02 1.5670-02 1.4400-02 1.3330-02 1.2420-02 9.3250-03 7.5140-03 5.459D-C3 4. 8150-03 4.3120-03 3.9070-03 3.5740-03 1.5980-03 5.7850-04 4.4C5C-04 SPUTTERING COEFFICIENT FOF NI + T+ 1.C.CJD-5C 1.8190-03 5.215D-r3 8.3270-03 1.1250-02 1.4020-02 1.9280-02 2.1810-02 3.9590-02 5.2170-02 6.1180-02 6.7800-12 7.6470-02 7.92CO-">2 8.144C-C2 8.3060-02 8.5730-02 8.1100-02 7.0510-02 6.5930-02 6.1890-02 5.8320-C2 5.5160-02 5.2340-02 4. 3600-02 4.0310-02 3.7510-02 3.5100-02 2.6760-02 2.1760-02 1.5990-02 1.4160-02 1.272O02 1.1550-02 1.0590-02 4.8110-03 1.7610-03 1.344D-C3 SPUTTERING COEFFICIENT FO? NI + 4hE+ 1. 0000-50 7.1400-03 1.412C-02 2.0600-02 2.6740-02 3.2610-02 4.3760-02 4.9120-C2 8.8900-02 1.1760-01 1.3870-01 1.5450-01 1.7590-01 1.8320-01 1.8880-01 1.9320-01 2.C40D-01 1.9550-01 1.7250-01 1..621D-01 1.5270-01 1.4440-C1 1.369C-01 1.3020-01 1.093D-J1 1.0130-01 9.4450-02 8.8550-02 6.7940-02 5.5490-02 4.C97D-02 3.6340-02 3.2680-02 2.9730-02 2.7280-02 1.2470-02 4.5870-03 3.5040-03 SPUTTERING COEFFICIENT FDR CU H + l.OCCO-50 1, 1.2000-02 1. 5.1540-02 5< 2.8740-02 2, 1.4830-02 1, 4.6400-03 4, 4.5450-04 3, SPUTTERING 0000-50 1.0000-50 l.OCOD-50 1.0000-50 4.8620-03 5QlQ-f:2 3.393D-C2 4.2840-02 4.7470-02 4.9900-02 1530-02 5.1230-^2 5.0730-02 4.3370-02 3.7060-02 5900-02 2.3610-02 2.1710-02 2.0120-02 1.8750-02 345D-C2 1.2320-C2 1.138D-C2 8.2740-03 b.5390-03 0610-03 3.6130-^3 3.2570-03 2.9660-03 1.2860-03 4460-04 COEFFICIENT FOP CU + 0+ 1.0000-50 1.0000-50 3.3390-03 6.0850-03 8.6400-03 1.1060-02 1.5630-02 1.783D-C2 3.2460-C2 4.2640-02 4.9760-02 5.4870-02 6.1380-02 6.3430-02 6.4930-02 6.6020-02 6.6820-02 6.2520-02 5.3670-02 4.9980-02 4.6760-02 4.3940-02 4.1460-02 3.9260-02 3.2510-02 2.9990-02 2.785D-C2 2.6030-02 1.9730-02 1.5990-02 1.1700-02 1.0350-02 9.285C-Q3 8.4270-03 7.7200-03 3.4860-03 1.2710-03 9.6900-04 (Continued) 15 ** 1 4- 2 3 2 1 1* * 1 1 1 2 1 6 1* * 1 1 3 5 3 1 2* 1 2 2 7 7 4 8* 1 1 7 1 1 6 1 * * 1 1 4 5 3 1 2 .OOOD-50 .1540-02 ,,1630-01 .2250-01 .3990-01 ..0740-01 .6700-02 .OOOD-50 .0000-50 .1060-03 .0190-03 .5230-03 .8230-04 .0580-04 .0000-50 .0000-50 .OS6D-03 .0440-03 .7900-03 .7C3D-03 .6510-04 .0000-50 .2620-03 .8120-02 .2310-02 .4400-02 .5140-02 .9670-03 .0000-50 .0000-50 .9830-04 .6250-03 .3060-03 .2039-04 .0060-04 .0000-50 .OOOD-50 .4360-03 .6150-03 .7520-03 ?524D-03 .1980-04 1 4 SPUTTERING .0000-50 9 .7330-02 5 2.3380-01 2 3,1240-01 3 2.244D-Q1 2 9 1 1 1 1 .1 1 6 7 1 1 3 4 3 1 1 1 2 3 7 7 4 6 1 1 9 1 1 5 7 1 1 4 5 3 1 1 .4530-02 8 .1570-02 8 SPUTTERING .0000-50 1 .0000-50 1 .2460-03 1 .9650-03 1 .4250-03 1 00050-04 5.3280-05 5 SPUTTERING .OOOD-50 1 .0000-50 1 .4000-03 3 .9000-03 4 0547D-03 3 .4990-03 1 .8370-04 1 SPUTTERING .0000-50 1 .9COD-03 3 .0210-02 3 .5170-02 7 .2400-02 7 .0910-02 3 .3560-03 4 SPUTTERING .0000-50 I .0000-50 1 .0400-04 9 .6040-03 1 .2320-03 1 .4890-04 4 .0000-05 5 SPUTTERING .0000-50 1 .0000-50 3 .7760-03 5 .3110-03 5 .4640-03 3 .3290-03 1 .5130-04 1 COEFFIC .7310-03 .2980-02 .486D-C1 .0090-01 .1080-01 .4580-02 .8820-03 COEFFIC .0000-50 .0000-50 .3640-03 .8990-03 .3390-03 .3710-04 .6240-05 COEFFIC .GCCD-5C .6450-04 .6570-03 .7300-03 .3340-03 .3420-03 .4100-04 COEFFIC .0000-50 .5240-03 .3370-02 .6610-02 .0300-02 .7450-02 .9460-03 COEFFIC .0000-50 .0000-50 .9480-04 .5670-03 .1650-03 .9310-04 .385D-C5 COEFFIC .OOOD-50 ,4470-04 .0460-03 .0220-03 .2190-03 .1810-03 .1560-04 IENT FOR 1.6620-02 1.046D-01 2.611D-01 2.894D-01 1.989C-01 7.6620-02 IENT FOR 1.CCCD-5C, 1. 5640-04 1,4640-03 1.829D-03 1.263D-03 4.8650-04 IENT FOR l.OCDD-50 1. 1250-03 3.876D-03 4.5550-03 3.1460-03 1. 2160-03 IENT FOR 1. 0000-50 9.2370-03 3.6290-02 7.7160-02 6. 8210-02 3.4570-02 IENT FOR 1.000C-5C 1. 2990-04 1. 0730-13 1. 5240-03 1.105D-C3 4.482D-G4 IENT FOF 1.0000-50 1.753D-G3 5.263D-03 4.755C-03 3.010D-C3 1.0630-03 CU 2. 1. 2. 2. 1. 7. NB 1. 4. 1. 1. 1. 4. NB 1. 1. 4. 4. 2. 1. NB 1. 1. 3. 7. 6. 3. MO 1. 3. 1. 1. 1. 4. MO 1. 2. 5. 4. 2. 9. + 4FE + 318D-02 3950-01 7170-01 782D-01 8830-01 0100-02 + H-f OCOD-50 7170-04 549D-C3 7610-03 1960-03 451D-Q4 + c* OCCD-50 753D-G3 0620-03 3840-C3 9800-03 1120-03 -*? 4HE + OOOD-50 4360-C2 8990-02 715D-C-2 6180-02 2140-02 + H + 0000-50 482D-C4 1420-03 478D-03 C51D-C3 112D-C4 + 0 + OOOD-50 7310-C3 437D-03 513D-03 8270-03 683D-G4 2. 1. 3. 2. 1. 6. 1. 7. 1. 1. 9. 4. 1. 2. 4. 4. 2. 1. 9. 1. 5. 7. 5. 2. 1. 5. 1. 1. 8. 3. 1. 3. 6. 4. 2. 8. 9490-02 702D-01 213D-C1 677D-01 495D-01 406D-02 OOOD-50 3000-04 958D-03 696D-03 5020-04 105D-04 i.'OGD-50 292D-03 951D-03 2210-03 3690-03 026D-03 210D-04 9120-02 746D-02 676D-P2 728D-02 0040-^2 OOOD-50 2680-04 5050-02 433D-03 4890-04 802D-04 OCOD-50 454D-C3 029D-03 294D-03 1840-03 8940-04 3. 1. 3. 2. 1. 3. 1. 9. 2. 1. 7. 1. 1. 2. 5* 4. 1. 4. 1. 2. 6. 7. 5. 1. 1. 6. 1. 1. 7. 1. L. 4. 5. 4. 1. 4. 560D-02 9540-01 2 83 D- 01 578D-01 2470-01 Oo20-J2 OCOD-50 365D-04 033D-03 6340-03 926D-04 9420-04 ?jOOO-50 7320-03 1090-03 3680-03 9770-03 3620-04 604D-03 3660-02 706D-02 612D-02 0450-02 564D-02 OOOD-50 7430-04 610D-03 3890-03 1540-04 d30D-04 OOOD-50 OJ6D-03 8970-03 0960-03 7910-03 092D-04 (Continued) 16 SPUTTERING COEFFICIENT FCP MC + T+ 1. 8. 9. 1, 7, 3. 4.* * 1. 1. 2. 2. 1. 7. 1.* * 1. 5. 3. 4. 3. 1. 1.* * 1. 1. 6. 2. 1. 8. 1. COOD-50 670D-04 2600-03 1770-02 969D-03 2800-03 78CD-04 OCCD-50 9340-03 0790-02 6680-02 8150-02 5CCD-03 0960-03 0000-50 2010-03 7860-02 6740-02 1410-02 285D-02 865D-03 0000-50 0000-50 8C2D-C5 6350-04 9850-04 6970-05 3170-05 1 1 9 1 7 2 *"/ 1 2 2 2 1 6 7 1 6 4 4 2 1 1 1 1 9 2 1 7 9 .OCOO-5C .2160-03 .f/350-C3 .1160-02 .3700-03 .8650-03 .2930-34 SPUTTERI .0000-50 .7120-03 *232D-02 .5330-02 .6800-02 .5530-03 .5540-04 SPUTTERI .OCOD-5G .5430-03 .0470-02 .426D-C2 .9030-02 .1220-02 .285D-J3 SPLTTERI .COOD-5C .0000-50 .8720-05 .5730-04 .8530-04 .6340-05 .1010-06 1. 1. 1. 1. 6. 2. 2. NG 1. 3. 2. 2. 1. 5. 5. NG 1. 7. 4. 4. 2. 9. 9. NG 1. 1. 1. 2. 1. 6. 6. * SPUTTERING * 1. 1. 5. 1. 8. 3. 5. * * 1. 1. 1. 3. 2. 1. 2. OOCD-50 0000-50 3780-04 0640-03 1530-04 6980-04 7830-05 1 1 fc 1 7 3 4 .COOD-50 .0000-50 .1^90-04 .0400-03 .6420-04 .2580-04 .OC9D-05 1. 1. 6. 1. 7. 2. 3. SPUTTERING 0000-50 COOD-50 4070-02 0720-02 6740-02 3720-02 3700-03 1 1 1 3 2 1 I .0000-50 .0000-50 .5810-02 .0840-02 .5470-02 .2230-02 .6580-03 1. 1. 1. 3. 2. 1. 1. 0000-50 5500-03 048D-C2 0580-02 8600-03 5470-03 519D-H4 COEFFIC CCOO-50 457D-03 356D-02 4C3D-C2 5640-02 828D-C3 7790-C4 COEFFIC OCOO-50 8360-03 2550-02 1880-02 7000-02 9730-03 8240-C4 COEFFIC ("000-50 0000-50 2390-04 4880-04 738D-04 8140-05 S74D-C6 COEFFIC OOCO-5'J 0000-50 7990-04 UC70-03 1920-04 9170-04 C78D-'35 COEFFIC 0000-50 OCOD-50 7350-02 0540-02 4290-02 1050-02 2800-03 1.000C-5C 4. 1040-03 1.0920-02 1.0C40-02 6.421C-03 2.296C-03 IENT FOR 1.0 DC 0-50 9.1730-03 2.456C-02 2.281P-C2 1.465D-02 5.255D-03 IENT FOR l.OCCD-50 1.7760-02 4.423C-02 3.9690-02 2.5260-02 8.986C-03 IENT FOR 1.0COD-5C 1.000O5G 1.443P-04 2.397D-C4 1.6370-04 6.161C-05 IENT FOR loCCCC-51; l.GOOD-50 7.351D-04 9.727D-C4 6.7940-04 2.643C-04 IENT FOR 1.JOOOO-50 4. 0520-03 1. 8720-02 3.004D-02 2.3210-02 1.010D-C2 1. 5. 1. 9. 6. 2. MO 1. 1. 2. 2. 1. 4. MO 1. 2. 4. 3. 2. 8. W 1. 1. 1. 2. 1. 5. H 1. 1. 7. 9. 6. 2. W 1. 7. 1. 2. 2. 9. OOGD-5G 947D-03 127D-02 5410-03 039D-03 09ZD-03 + T + OOCD-5C: 3310-02 5380-02 170D-G2 3780-02 7890-03 + 4HE + 0000-50 4960-02 5580-02 77CD-C2 3740-02 1860-03 + H + CCGD-5U 0000-50 624C-04 3C6D-04 5480-04 628D-05 + D + OOCD-50 9100-04 823D-04 3820-C4 440D-04 4200-04 + 4HF + 0000-50 4120-03 9940-02 943D-C2 2220-02 3000-03 1 .0000-50 7. 3360-03 1.253D-02 9.0910-03 4. 6830-03 1.923D-03 1. OCOD-50 1.6440-02 2.8320-02 2 .C 690-02 l.f 70D-02 4.4020-03 2.3130-03 3.C39D-02 5.0150-02 3.5900-02 1.838D-02 7.5210-03 1. OCCD-50 1.0000-50 2.4490-04 2.218D-C4 1.22 10-04 5.1840-05 1.0000-50 3.3230-04 1. 0150-03 9.0490-04 5. 1320-04- 2.2320-04 1. 0000-50 9.8090-03 2. 7100-02 2. 8760-02 1.8340-02 8.628D-03 4. 8. 1. 3. 3. 8. 1. 1. 2. 1. 3. 2. 3. 3. 4. 3. 1. 3. 1. 2. 2. 2. 1. 2. 1. 4. 1. 8. 4. 1. 1. 1. 2. 2. 1. 4. 9910-04 412D-"3 2310-02 6820-03 3490-03 8820-04 1150-03 8870-02 783D-02 9760-02 7970-03 036D-03 7970-J3 4580-02 9050-02 4260-02 5090-72 4690-03 000 D-5-.) 990D-05 6340-04 135D-04 0140-04 4290-05 0000-50 4520-04 0680-03 7330-04 2390-04 060D-04 0000-50 2080-02 9800-02 8080-02 567D-02 2560-03 (Continued) ** 1.1. 5. 1. 1. 5. 9. * 0000-50 0000-50 056D-03 2450-02 0930-02 6160-03 6940-04 1.0000-50 1. 1. 3. 2. 1. 2.* * 1. 2. 3. 6. 5. 2. 3.* * 1. 4. 6. 1. 1. 4. 8.* * 1. 1. 1. 1. 1. 5. 8.* * 1. 1. 5. 2. 4. 3. 8. OCOO-50 9130-02 6440-02 9620-02 4280-02 3490-03 0000-50 539D-03 7910-02 6210-02 2270-02 4590-02 9700-03 0000-50 2550-03 5480-02 2230-01 OOOD-01 8590-02 0450-03 0000-50 3240-02 1490-01 7500-01 2970-01 7780-02 9430-03 0000-50 0000-50 3970-05 9140-04 0650-04 380D-04 8610-05 1 1 5 1 1 5 6 1 1 2 3 2 1 1 1 3 4 6 4 2 SPUTTERING .0000-50 1. .0000-50 1. -8310-03 6, .2530-02 1. .0410-02 9. .0060-03 4. .7820-04 5, SPUTTERING .0000-50 1. .0000-50 1. .1260-02 2. .6030-02 3. .7990-02 2. .2660-02 1. .6360-03 1. SPUTTERING COEFFICIENT FOR 0000-50 0000-50 5130-03 2430-02 9340-03 5240-03 2350-04 COEFFIC 0000-50 0000-50 3100-02 5260-02 6510-02 139D-C2 2600-03 COEFFIC ?OOOD-5C 1.0000-53 .7260-03 4. .1680-02 4. .5020-02 6. .9210-02 4. .1750-02 1. 2.7600-03 2. 1 6 7 1 9 4 5 1 1 1 1 1 5 6 1 1 6 3 43 6 SPUTTERING 8660-03 4930-02 3300-02 6490-02 9520-02 1230-03 COEFFIC .0000-50 1.0000-50 .2320-03 8. .2340-02 7. .2100-01 1. .4560-02 8. .3100-02 3. .6070-03 4. SPUTTERING .0000-50 1. .6810-02 2. .2490-01 1. .6940-01 1. .2130-01 1. .0830-02 4. .1940-03 4. SHUTTERING .0000-50 1. .0000-50 1. .7100-05 7. ,2300-04 3. .1140-04 4. .1620-04 2. .4520-05 5. 133D-03 8300-02 1850-C1 9650-02 8790-02 3180-03 COEFFIC 0000-50 0250-02 3320-01 6310-01 1390-01 5460-02 7530-03 COEFFIC 0000-50 0000-50 9710-05 4670-04 1300-04 9700-04 1020-05 1. 0000-50 4.4830-04 7.1170-03 1.2240-02 9.493C-03 4.1320-03 IENT ? FOR 1. 0000-50 6.2660-03 2.4720-02 3. 4340-02 2.519C--T2 1.0360-02 IENT FOR l.GCOD-50 1.4800-02 4.774D-02 6.139D-C2 4.407C-02 1.7740-02 IENT FOR 1.00CD-5C 2.4750-02 8.3520-02 1.1550-01 8. 5220-02 3.5310-02 IFNT FOR 1. 0000-50 5.0800-02 1.403D-C1 1.568D-C1 1.0740-01 4.1170-02 IENT FOP 1. 0000-50 1.000D-5C 9.1940-05 3.6460-04 4. 1230-04 2.7990-04 AU 1. 2. 7. 1. 9. 3. AU 1. 1. 2. 3. 2. 9. AU 1. 2. 5. 5. 4. 1. AU 1. 3. 8. 1.a. 3. + H + 0000-50 0300-03 6550-C3 2000-02 0890-03 8060-03 + 0 + 0000-50 0990-02 6130-02 3370-02 399D-02 5140-03 + T + OCOD-5U 2060-02 0180-02 9440-02 1890-02 627D-02 +? T + 0000-50 9420-02 8100-02 124D-C1 1230-02 2440-02 1. 3. 1. 1. 7. 3. 1. 1. 3. 3. 1.a. i. 2. 6. 5. 3. 1. 1. 4. 1. 1. 6. 3. 0000-50 1420-03 '"^8 10-02 1740-02 5050-03 5310-03 0000-50 3760-02 3770-02 2390-02 9450-02 8330-03 0000-50 8280-02 2670-02 7530-02 3740-02 5040-02 GC/CD-50 8320-02 1320-01 0910-01 6010-02 002D-02 1. 4. 1. 1. 6. 1. 1. 1. 3. 3. 1. 4. 1. 3. 6. 5. 2. 7. 1. 5. 1. 1. 5. 1. OCOO-50 1690-03 2010-02 1470-02 4130-03 7410-03 0000-50 6660-02 6060-02 1430-02 6440-02 2600-03 0000-50 3490-02 6140-02 5690-02 8390-02 2260-03 0000-50 7550-02 2090-01 067/0-01 5360-02 4570-02 AU + 4HE+ 1. 7. 1. 1. 1. 3. U 1. 9. 1. 3. 4. 2. OCOD-50 0920-02 4630-01 5C70-01 0160-01 7660-02 + H + 0000-50 5030-06 0390-04 7830-C4 1000-04 6480-04 5. 8. 1. 1. Q. 3. 1. 2. 1. 3. 3. 2. 5980-03 8590-02 7420-01 4490-01 0570-02 4720-02 0000-50 550D-05 8840-04 886D-04 8830-04 ,5130-04 9. 1. 1. 1. 6. 1. 1. 4. 2. 3. 3. 1. 5150-03 ) 3 ">D -01 7810-01 3950-01 7150-02 6420-02 0010-50 0190-05 4840-04 9640-04 6240-04 4580-D4 (Continued) * *1. 7. 2. 9. 1. 1. 3.* * 1. 1. 3. 1. 5. 1. SPUTTERI 0000-50 6170-05 1900-03 4020-03 3740-02 238D-02 5300-03 0000-50 9460-02 0510-02 1790-02 1390-03 4930-03 1.6970-04 * * 1. 6. 8. 3. 1. 4. 4. * * 1. 1. 2. 8. 3. 1. 1. * 1, 4. 6. 2. 1, 3. 3. * # 1. 2. 4. 1. 9. 2. 3. 0000-50 4480-02 3140-02 2360-02 4190-02 1450-03 7280-C4 OOOD-5C 8270-01 2730-01 8680-02 8960-02 1400-02 3010-03 OCOD-50 9080-01 0420-01 36CD-C1 0370-01 0360-02 4670-03 1 1 2 1 1 1 2 1 2 2 1 4 1 1 1 6 7 2 1 3?a 2 1 2 7 3<; 8 8 5 5 .0000-50 .2610-04 .5460-03 .0490-02 .4030-02 .1690-02 .5920-03 SPUTTERI .0000-50 .1770-02 .9200-02 .0080-02 .5280-03 .2650-03 ,1440-04 SPUTTERI .Ca.CD-50 .9190-02 .9540-02 .77CD-02 .2510-02 .5130-03 .1880-04 SPUTTERI .7110-02 .9470-01 .1740-01 .5940-02 .4360-02 .6580-03 .774D-C4 SPUTTERI .9230-02 .2200-01 .7800-01 2. 0210-01 9 2 2 .1480-02 .5730-02 .3380-03 NG 1. 1. 2. 1. 1. 1. 2. NG 1. 2. 2. 8. 4. 1. 8. NG 1. 7. 7. 2. 1. 3. 2. NG 6. 2. 2. 6. 3. 8. 6. NG 1. 5. 5. 1. 8. 2. 1. SPUTTERING 0000-50 0680-04 4480-04 9780-04 0130-05 7C60-05 1450-06 1 2 4 1 7 2 2 .0000-50 .3950-04 1. 2. .3230-04 4. .7100-04 .9790-05 .2990-05 .1240-06 U 7. 2. 1. COEFFIC 0000-50 7480-04 8910-03 1330-02 4190-02 105D-C2 0610-03 COEFFIC 0000-50 3690-02 7950-02 8230-03 0510-03 0980-03 6330-05 CGEFFIC ?660-02 3120-02 6120-02 4280-02 1200-02 G500-C3 4C70-04 CGEFFIC 7860-02 0470-01 0810-01 6570-02 0760-02 3870-03 625D-G4 COEFFIC 9360-01 4800-01 5320-01 7720-01 1920-02 234D-02 7660-C3 COEFFIC OOOD-50 6760-04 1900-04 5090-04 1660-05 0000-05 6050-06 IENT FLIP 1. 0000-50 6.2460-04 3.2270-C3 1.199C-02 1. 4260^2 1.C480-C2 IENT FOR 3. 2680-03 3.217C-02 2.678D-C2 7.8590-03 3.6690-^3 9.7040-T4 IENT FOP 3.2560-02 9.033D-C2 7. 2930-02 2.1640-f 2 1.0150-02 2.6970-03 IENT FOR 1.023D-C1 2.4830-^1 1.9940-01 5.936D-C2 2.7870-02 7.416C-03 IENT FOR 2.8240-T1 6.6140-01 5.3010-01 1.58CD-C1 7.422D-G2 1. 9760-02 IENT FOR 1.0000-50 4.1080-04 4.0570-04 1. 3520-04 6.5090-05 1. 7710-05 U 1. 1. 3, 1. 1. 9. AL 8. 3. 2. 7. 3.a. AL 4. 9. 6. 1. 9. 2. AL 1. 2. 1. 5. 2. 6. + 4HE+- 0000-50 0420-03 5560-C3 2520-02 4270-02 97m-C3 + H + 8420-03 3500-C2 5680-02 0940-03 3540-03 6990-04 + D + 3310-02 2290-02 9970-02 955D-C2 2820-03 41fcD-03 + T + 292D-C1 528D-C1 9130-01 3630-C2 5500-02 6500-03 1.0000-50 1.4400-03 6.1070-03 1. 2940-02 1.3830-02 9.5050-03 1. 3180-02 3.2950-02 1.8250-02 6.4710-03 2. 3590-03 7. 8850-04 5.1860-02 9. 0160-02 4.9890-02 1.7840-02 6. 5370-03 2.1920-03 1.5070-01 2.4660-01 1.3650-01 4.696D-C2 1. 7960-02 6.0300-03 1.0000-50 1. 7o 1, 1. 5. 1. 3. 1. 5. 1. 3. 5. 8. 3. 1. 5. 9 = 1. 2. 1. 4. 1. 2. 8220-03 989T- C ] 327n--} ? 3120-'. .-: 7020-C 3 6650-02 1810-02 4280-C2 9530-03 8260-03 3110-^4 8790-02 6800-02 9110-02 6420-02 066D-J3 2200-04 6830-01 3730-01 0710-01 5070-02 3930-02 5370-03 AL + 4HE+ 3. 6. 5. 1. 6. 1. SI 6. 4. 3. 1. 5. 1. 52CD-C1 7240-01 0860-01 4280-01 7900-02 7720-02 + H + 676D-C5 5170-04 9270-04 2270-04 9670-05 5900-05 4.0780-01 6.5580-01 3.6320-01 1.3030-01 4.7840-02 1.6060-02 1.2240-04 4.5990-04 2.9420-04 1.1240-04 4.2350-05 1.4430-05 4. 6. 2. 1. 3. 6. 1. 4, 2. 1. 3. 6. 5330-.11 3C9D-01 8500-01 2000-01 7090-02 7590-03 6830-04 5510-04 3590-04 0380-04 2970-05 1100-06 (Continued) 19 SPUTTERING COEFFICIENT FOR SI D+ 1.0000-50 7.2630-04 1.2020-03 5.3640-04 2,4580-04 7.4180-05 9.6530-06 1.0000-50 1.4300-04 3.0950-04 4.4350-04 5.5420-04 6.472D-04 7.9420-04 8.5290-04 1.156C-03 1.2400-03 1.2510-03 1.2320-03 1.1660-03 1.1300-03 1.0940-03 1,0590-03 7.946D-04 6.3850-04 4.6410-04 4.0990-04 3.6780-04 3.339D-04 3.0610-04 2.8270-04 2.1770-04 1.9^60-04 1.7780-04 1.6310-04 1.159T-04 9c032D-05 6.3030-05 5.4850-05 4.859D-C5 4.363D-C5 3.9610-^5 5.8460-06 4.4190-06 SPUTTERING COEFFICIENT FOh SI * T+ 1.68110-35 . .0000-50 :,0790-03 .',.2760-03 1.4650-03 6.7220-04 2.0320-04 2.3730-05 * 1.0000-50 5.6060-03 8.7020-03 3.8930-03 1.7880-03 5.4060-04 6.3160-05 * * 1.0000-50 4.7270-04 2.1890-03 1.6450-03 9.0090-04 3.1170-04 4.0010-05 * * 1,0000-50 1.8670-03 6.0170-03 4.4830-03 2.4630-03 8.5530-04 1.1010-04 * * 1.0000-50 5.5210-03 1.6480-02 1.2250-02 6.7400-03 2.3430-03 3.0200-04 1.0000-50 6 2.2.530-03 2 3.1790-03 3 1.2680-03 1 5.9560-04 5, 1.7270-04 1 1.6030-05 1 SPUTTERING ,1660-04 1.0280-03 1.3630-03 1.6420-03 1.8780-J3 ,4020-03 3.18CD-03 3.3920-03 3.4140-03 3.3610-03 ,0800-03 2.9810-03 2.8850-03 2.167G-G3 1.743D-33 ,1200-03 1.0050-03 9.1280-04 8.3680-04 7.7320-04 ,3530-04 4.8660-04 4.4630-04 3.1730-04 2.4740-04 .5030-04 1.331C-04 1.1960-04 1.0350-114 4.606D-T5 .2120-05 COEFFICIENT FOR SI *? 4HE + 5.2170-04 1.8260-03 2.0850-03 6.0560-03 6.4460-03 8.4710-03 8.4440-03 8.1790-03 7.9170-03 3.3690-03 2.978D-Q3 2.6720-C3 1.5840-03 1.4240-03 1.294C-33 4.5950-04 3.9990-04 3.5430-04 4.2670-05 3.2260-G5 SPUTTERING COEFFICIENT FOR SC + H+ 3.75CD-03 4.473D-03 9.0180-03 9.0710-03 7.664D-C3 5.7580-03 2.4270-03 2.2250-03 1.1870-03 8.4410-04 3.182D-C4 2.8880-04 1.0000-50 1 5.7950-04 6 2.2410-03 2 1.4850-03 1 8.1350-04 7 2.6800-04 2 2.7250-05 2 SPUTTERING .0000-50 I.0000-50.7780-04 1.3590-03 .2690-03 2.282C-03 .3550-03 1.247D-C3 .4260-04 6.837D-04 .354D-C4 2.1010-04 .0710-05 COEFFICIENT FOR SC 9.1780-05 2.4820-04 1.7360-03 1.962D-03 2.2830-03 2.0840-03 1.1560-C3 1.0790-03 6.340D-G4 4.6820-04 1.8990-04 1.733D-04 D + l.OOGD-50 2.3780-04 6.4460-04 2.1150-03 2.3440-03 3.9800-03 6.1410-03 6.2C8D-03 6.2340-03 4.0500-03 3.6970-03 3.4040-03 2.2250-03 2.0320-03 1.8710-03 7.3570-04 6.4640-04 5.7710-04 7.5040-05 5.7C2D-05 SPUTTERING COEFFICIENT FOP SC + T+ 1.0140-03 1.3620-03 4U9050-03 5.4610-03 6.2320-03 5.6720-03 3.1570-03 2.9460-03 1.736D-03 1.283C-03 5.2160-04 4.7610-C4 1.0000-50 1.340D-03 2.365C-03 6.1680-03 6.7710-03 1.1C9D-02 1.6810-02 1.6990-02 1.7050-02 1.1070-02 1.0110-02 9.3100-03 6.0900-03 5.5620-03 5.1230-03 2.0160-03 1.7710-03 1.582D-03 2.0580-04 1.5640-04 3.3100-03 4.2080-03 1.3540-C2 1.501D-02 1.7040-02 1.5500-02 8.636D-C3 8.0600-03 4,7530-03 3.5150-03 1.429D-C3 1.305C-03 5.084D-03 8.9270-33 4.631D-03 2.056D-03 6.5810-34 1.2260-04 3.966D-D4 2.102D-03 1.843D-03 1.C11D-73 3.7350-^4 7.6240-05 1.693D-03 5.8050-03 5.0200-03 2.7640-03 1.024D-03 2. r-970-04 5.0860-03 1.5930-02 1.372D-02 7.561D-03 2.8060-03 5.7 SOD-54 (Continued) 20 * *1. 1. 4. 3. 1. 6. S.* * 1. 9. 8. 6. 3. 1. 1.* * 1. 6. 2. 1. 1. 3. 4. * * OOOC-50 5140-02 3850-02 2570-02 7920-02 2340-03 03SD-C4 OCOD-50 7770-04 1990-03 8050-03 8450-03 3630-03 7790-04 0000-50 0700-03 3120-02 8850-02 0700-02 8G8D-03 9910-04 1.0000-50 1. 6. 5. 2. 1. 1. * * 1. 5. 1. 1. 7. 2. 3. * * 1. 3. 4. 4. 9030-02 3810-02 181D-C2 9430-02 0490-02 3770-03 1 1 4 2 1 55 1 1 8 6 3 1 1 1 6 2 1 9 33 1 2 6 4 2 9 9 SPMTTPft ( .3610-03 .6830-02 .4710-02 .9430-02 .6190-02 .3640-03 .473D-04 SPUTTERI .OOGD-5C ?2^36C-03 .4890-03 .1910-03 .4840-03 .1740-03 .2130-04 SPUTTERI . COCO- 50 .6510-03 .3810-02 .7160-02 .6960-03 .2830-03 .4C60-04 SPUTTERI .0000-50 .2120-02 .5650-02 .7180-02 .6680-02 .0480-03 .3990-04 MG 4. 1. 4. 2. 1. 4. 4. NG 1. 1. 8. 5. 3. 1. 9. NIG 1. 7. 2. 1. 8. 2. 2. NG 2. 2. 6. 4. 2, 7. 7. SPUTTERING 0000-50 3330-02 7C3D-01 3800-01 8440-02 7990-02 6750-03 1 6 1 1 7 2 2 .0000-50 .1340-02 .7510-01 .2570-01 .1130-02 .4140-02 .5090-03 9. 6. 1. 1. 6. 2. 1. SPUTTERING 0000-50 3300-C4 9700-03 3140-03 2.4730-03 8. 1. 8620-04 1660-04 1 5 5 3 2 7 7 .0000-50 .3060-04 .1720-03 .9380-03 .2440-03 .6440-04 .9590-05 1. 7. 5. 3. 2. 6. 6. CCEFFICI 3130-03 8400-02 5160-02 6870-02 479D-J2 7130-03 163D-Q4 CCEFFICI (?OCD-5C 6580-03 6770-03 680D-C3 1890-03 0330-03 2260-C5 COEFFICI OOOD-50 5490-03 4260-02 5760-02 8790-03 8890-03 590D-G4 CCEFFICI 0300-03 2840-02 6810-02 332D-H2 4440-02 9640-03 1490-04 COEFFICI 7280-03 319B-02 7810-01 1540-01 5160-02 1250-02 9080-03 COEFFICI 0000-50 8210-04 30BD-03 623D-C33 0570-03 7300-04 054D-05 ENT FOR 6.945C-03 2.9700-02 4.5330-02 2.475D-C2 1.3620-02 4. 2080-03 ENT FOR 1.COCD-5C 4.4720-03 8.792D-03 5.251D-C3 2.9430-03 9.2310-04 ENT FOR 9.016C-^4 1.4090-02 2.452C-C2 1.458D-C2 8. 1970-03 2.5B3C-C3 ENT FOR 5.9260-03 3. 9950-02 6.749D-02 4. 00 80-02 2. 2570-02 7.120C-03 ENT FOR 1.9580-C2 1.0780-01 1. 7990-31 1.0680-01 6.0170-02 1.900C-C2 ENT FOR l.OOOC-50 2.549D-C3 5.3970-03 3.3560-03 1.9CCD-03 6.018C-04 SC 9. 3. 4. 2. 1. 3. V 1. 6. 8. 4. 2. 8. V 2. 1. 2. 1. 7. 2. V 9. 5. 6. 3. 2. 6. V 2. 1. 1. 9. 5. 1. + 4HE + 389D-C3 6120-02 5290-02 2960-02 264D-C2 8030-03 + H + 0000-50 087D-C3 8550-03 8860-03 7340-03 3510-04 + D + 3190-C3 7970-02 4650-02 3570-02 619D-C3 3370-03 + T + 46CD-C3 0200-02 7820-02 732D-C2 0980-02 4430-03 + 4HF + 8620-02 3470-01 8080-01 9450-02 5930-02 7190-02 1.1720-02 4.0000-02 4. 1190-02 2.1430-02 9.348D-03 3.4720-03 1.0000-50 7.1000-03 8.3810-03 4.5720-03 2.0330-03 7.6280-04 3.6260-03 2.0440-02 2.3210-02 1.2700-02 5.6720-03 2.1350-03 1. 2770-02 5.6720-02 6.3770-02 3.4940-02 1.5620-02 5.8880-03 3.712D-C2 1.5170-01 1.6990-01 9. 3120-02 4.1670-02 1.5710-02 1. 4. 3. 4010-02 239D-02 6460-C? 2.01QD-C2 7. 1. 4. 7. 7. 4. 1. 3. 4. 2. 2. 1. 4. 9. 1. 6. 5. 3. 1. 2. 4. 1. 1. 8. 3. 6. 4640-0? 530 D-; - 2920-04 7610- )35^4Q 03 2990-03 6280-03 3780-04 866D-1 3 2050-02 0890-02 1950-02 5470-03 4700-04 5930-02 0990-02 7390-02 2870-02 2530-02 6120-03 5300-^2 6290-01 5290-31 7600-02 3410-02 9720-03 CR + H + 1. 3. 5. 3. 1. 5. 0000-50 5790-03 4510-03 1280-03 7670-03 4470-04 1.0000-50 4.2360-03 5.2450-03 2. 9310-03 1.3180-03 4.9780-04 1. 4. 4. 2. 1. 2. 0000-50 6730-03 7590-03 7590-03 0570-03 2110-04 (Continued) SPUTTERING COEFFICIENT FOR CR 0 1. 3. 1. 1. 6. 2. 3.* * 1. 1. 3. 3. 1. 6. 8.* * 1. 2. 1. 8. 4. 1. 2.* * 1. 6. 2. 2. 1. 6. 8.* * 1. 2. 7. 7. 4. 1. 2.* * 1. 5. 2. 2. 1. 4. 6. 0000-50 2100-03 3780-02 1710-02 7380-03 4270-03 207D-04 0000-50 0350-02 7830-02 1960-02 8420-02 6450-03 7920-04 0000-50 9260-02 OC70-01 4880-02 8950-02 7670-02 3400-03 0000-50 6600-03 6720-02 6920-02 6720-02 4160-03 8820-04 0000-50 0410-02 3800-02 3930-02 5960-02 7660-02 4470-03 9730-03 7720-02 0260-01 0260-01 2600-01 8420-02 7130-03 1.0000-50 1 3.8990-03 4 1,4260-02 1 1.0690-02 9 6.1150-03 5 2.0940-03 1 2,1900-04 1 SPUTTERING 1.0000-50 1 1.2110-02 1 3. 9080-02 3 2.9200-02 2 1.6730-02 1 5.7350-03 5 6,0050-04 4 SPUTTERING 1. OOOD-50 4 3.3790-02 3 1.0400-01 1 7.7560-02 7 4.4460-02 4 1.5250-02 1 1.5980-03 1 SPUTTERING 1.0000-50 1 7.6110-03 8 2.8000-02 2 2.5030-02 2 1.5320-02 1 5. 5680-03 4 6.0910-04 4 SPUTTERING 3.2380-03 6 2.2920-02 2 7.7230-02 7 6.8740-02 6 4.2100-02 3 1.5330-02 1 1.6780-03 1 SPUTTERING 1.1580-02 2 6.4510-02 7 2.1190-01 2 1.8840-01 1 1.1540-01 1 4.2030-02 3 4.6040-03 3 .0000-50 .1460-03 .4570-02 .8440-03 .6110-03 .8450-03 .6660-04 COEFFIC .0000-5C .2730-02 .9900-02 .6890-02 .5340-02 .0520-03 .5700-04 COEKFIC .0670-03 .5380-02 .0610-01 .1420-02 .0780-02 .3A4D-G2 .2160-03 COEFFIC .2610-33 .5450-03 .8960-02 .3350-02 .4150-02 .9270-03 .6460-G4 COEFFIC .5160-03 .5390-02 .9800-02 .4140-02 .8890-02 .3560-02 .2800-03 COEFFIC .0260-02 .1180-02 .1890-01 .7580-01 .0660-01 .7190-02 .5120-03 1.0000-50 8.100C-03 1.4770-02 9.1250-03 5.186C-C3 1.6500-03 IENT FOR 2.7460-C3 2,2960-02 4. 0420-02 2.4930-02 1.418D-C2 4.5200-03 IENT FOR 9. 8200-03 6. 1930-02 1.0740-01 6.6220-02 3.770C-02 1.20 20-02 IENT FOR Z, H 780-03 1,4960-02 2.963C-02 2.1890-02 1.3150-02 4.4230-03 IENT FOR 9.5610-03 4.2400-02 8.171C-02 6.0120-02 3. 6160-02 1.2180-02 IENT FOR 2. 8420-02 1.1730-01 2.2410-01 1. 6480-01 9.9130-02 3.339C-02 1. 1. 1. 8. 4. 1. CR 4. 2. 4. 2. 1. 4. CR 1. 7. 1. 6. 3. 1. ZN 3. 1. 3. 2. 1. 4. ZN 1. 5. 8. 5. 3. 1. ZN 3. 1. 2. 1. 9. 3. 0070-03 0500-02 4890-C2 5100-03 824D-03 4940-C3 + T + 8160-G3 9210-02 0710-02 325D-C2 3200-0? 0920-03 + 4HF + 5060-02 8230-02 0820-01 1770-02 5080-02 0890-02 ?f- H + 6C4D-G3 9470-02 0200-02 0600-02 2300-02 0170-03 + 0 + 2440-02 4440-02 3120-02 0580-02 3820-02 1060-02 + T + 6170-02 5000-01 2790-01 5510-01 2710-02 0330-02 1 1 1 7 2 1 6 3 3 2 9 3 1 8 1 5 2 9 4 2 3 1 9 3 1 6 8 5 2 1 4 1 2 1 7 2 ? ? * ? . ? ? ? ? ? ? ? ? ? ? ? ? ? 7810-03 2050-02 4230-02 9780-03 6030-03 3660-03 7410-03 328D-C2 8850-02 1800-02 8600-03 7410-03 998D-'">2 8830-02 0320-01 7920-02 6220-02 9520-03 .6660-03 ? * ? ? ? * ? ? ? ? ? ? ? ? ? ? ? 2670-02 0820-02 9460-02 3500-03 6810-03 5200-02 2990-02 4630-02 3460-02 5720-02 0130-02 3600-02 7320-01 3190-01 4650-01 0520-02 7800-02 2. 1. 1. 7. 2. 6. 8. 3. 3. 2. 7. 1. 2. 9. 9. 5. 2. 4. 5. 2. 2. 1. 7. 1. 1. 6. 7. 5. 2. 4. 5. 1. 2. 1. 5. 1. 5090-03 3080-0.7 2910-02 5130-03 394-D-03 0750-04 5730-03 5990-02 5230-02 0530-02 9220-03 6650-03 4680-02 5920-02 3560-02 4550-02 1070-02 4310-03 681D-C3 5030-02 8980-02 8440-02 5930-03 667D-D3 7850-C2 9200-02 9570-02 068D-J2 0890-02 5920-03 0770-J2 9010-01 1800-01 3890-01 7230-02 2600-02 (Continued) uT(t?RING FOK ZN 4H6 + 9. 1- 5. 5. 3. 1. 1, * * 1. 1. 2. 3. 2. 9. 1. * * 1. 1. 7. 9. 6. 2. 3. * * 1. 2. 2. 2. 1. 7. 1. * * 1. 8. 5. 7. 4. 1. 2. 1630-03 5570-01 3950-01 3900-01 3520-01 2890-01 7870-02 3 1 5 5 3 1 1 .4000-02 .7370-01 .6420-01 .0110-01 .C71D-31 .1190-01 .2260-02 5. 1. 5. 4. 2: 9. 9. SPUTTERING 0000-50 OOOD-50 5C8D-C3 4920-03 3570-03 6190-04 3900-04 0000-50 QOOO-50 5780-03 743D-C3 5890-03 7060-03 9350-04 1 1 2 3 2 8 9 1 5 8 9 6 2 2 .0000-50 .CCCO-50 .7510-03 .3130-03 .1780-03 .3940-04 .5700-05 SPUTTERI .0000-50 .7900-04 .1560-03 .2410-03 .0920-05 .3630-03 .7110-04 1. 1. 2. 3. 2. 7. 7. NG 1. 8. 8. 8. 5. 2. 2. SPUTTERING COO 0-50 5310-03 1290-02 6830-02 8160-02 4730-03 0890-03 0000-50 7820-03 7280-02 1540-02 8440-02 9950-02 911C-03 1 3 2 2 1 6 7 1 1 6 6 4 1 2 .0000-50 .3000-03 .2810-02 .5450-02 .6790-02 .5270-03 .5030-04 SPUTTERI .CO?D-5u .0720-02 .1240-02 .7850-02 .4800-02 .7430-02 .OC6D-03 1. 4. c. . 2. 1. 5. 5 . NG 1. 1. 6. 6. 4. 1. 1. * SPUTTERING * 1. 1. 4. 7. 4. 2. 3. 0000-50 OOOD-50 6850-03 0530-03 936C-03 0760-03 0680-04 1 1 5 6 4 1 2 .0000-50 .0000-50 .1720-03 .7510-03 .5790-03 .8160-03 .1160-04 1. 1. 5. 6. 4. 1. 1. 6770-02 9140-01 3270-01 6770-01 337D-01 8990-02 3500-03 COEFHIC 0000-50 CCOO-50 9450-03 1390-03 0260-03 4580-04 2160-05 COEFFIC 0000-50 7970-r>4 6190-C3 7560-03 6700-03 101D-03 Q730-04 COEFFIC 3000-50 0380-03 4030-02 4110-02 5630-02 3040-03 7390-04 CDEFFIC OfOQ-5C 2600-02 4420-02 4290-02 1710-02 5500-02 5340-03 COEFFIC 0000-50 C 000- 50 5690-03 4360-03 2730-03 6170-03 6200-04 7.8270-02 3.1350-01 5.9650-01 4.3840-01 2=6380-01 8.3880-02 IENT FOR 1.0000-50 5.6350-04 3.1C20-C3 2.9770-03 1.8950-03 6.718D-C4 IENT FOP 1. OOOD-50 3.134C-03 8.993P-;3 8.305D-03 5 .3 06 0-^3 1.893C-03 IFNT FOR 1.COC.D-5C 9.724C-03 2.5010-02 2.287D-C2 1.4630^2 5.2310-03 IENT FOR 1.CCCD-5C 2.7190-02 6. 6990-02 6.1000-02 3-.904C-02 1.397C-02 IENT FOR 1. OOOD-50 1.0030-03 5.8950-03 6.1340-03 4. 0080-03 1.4590-03 9. 4. 6. 4. 2. 8. ZP 1. 1. 3. 2. 1. 6. ZR 1. 4. 9. 7. 4. 1. ZP. 1. 1. 2. 2. 1. 4. ZR 2. 3. 6. 5. 3. lo 8760-02 0020-01 0660-01 1260-01 467D-01 0720-02 \- H+- 0000-50 2tl3D-03 2290-03 8280-03 7H1D-03 1J.8D-C4 + n+ OCOO-50 7320-03 297D-C3 8940-03 9890-03 7250-03 + T + 0030-50 3850-02 5810-02 1750-02 3760-02 7660-03 +? 4HE + 36CD-02 7900-02 9070-02 799D-C2 672D-C2 273D-02 1. 1840-01 4.6170-01 6.1710-01 3.8980-01 1. 3770-01 7.3980-02 1. OOOD-50 1.8050-03 3.6950-03 2.693D-03 1.377D-03 5.6200-04 1.0QOD-.<0 5.929D-'J3 1.037D-C2 7.5210-03 3.8660-03 1.5850-03 8.6820-04 1.6970-02 2.8610-02 2.0720-02 1.0670-02 4.3810-03 4.628D-C3 4.6020-02 7.636D-02 5.5260-02 2. 8480-02 1.170D-02 1. 5. 5. 3. 1, 3. 1. 2. 3. 2. 1. 2. 1. 6. 1. 7. 3. 7. 1. 1. 2. 1. 8. 2. 6. 5. 7. 5. 2. 5. 3730-01 0640-01 801D-01 696H-C1 5250-01 3530-02 0000-50 2000-03 6490-03 5710-03 1300-03 5880-04 OCOD-50 8530-0"^ '"200-?" ldlO-03 1760-03 3150-14 7240-03 9390-02 8090-02 9790-02 7690-03 0240-03 7bBD- - 2320- ." 4900-02 278D-T<2 3410-02 4030-03 RH + H + 1. 2. 6. 5. 3. 1. 0000-50 3310-03 1650-03 8530-03 776D-G3 3310-^3 1.0000-50 3.3170-03 7.2650-03 5. 5940-03 2.9460-03 1.2240-03 1. 4. 7. 5. 2. 5. 0000-50 0800-03 2960-03 3560-03 4300 -03 6850-;^ (CoirMnue'i) 23 * * 1. 0000-50 l.OCOD-50 1.3610-02 1.9150-02 1.3400-02 5. 6680-03 8.4290-04* * 1.0000-50 4. 3370-03 3.8490-02 5.2240-02 3.6590-02 1. 5510-02 2.3100-03 SPUTTERING COEFFICIENT FCC ??h C + l.OCCO-50 1.0000-50 3 .CPOr-50 1.GCOO-5C l.f.OO^-S-1 9. 7720-04 1.4960-03 5.5fOr-f3 H.414D-"3 l.f-640-02 1.4950-02 1. 5890-02 1.665C-"2 1.7290-C2 1.9d50-"2 1.8300-02 1.7450-02 1. 6620-02 1.587P-C2 1.51?0-.')2 1.2440-02 1.162D->2 l.^U-f'Z l.C27D-"2 8.r2bP-*3 4.9630-33 4.422D-J.3 3.9S2C-C3 3.642D-l--3 3.351D-S.3 5.8170-04 4.4540-04 SPUTTERING COEFFICIENT FCR RH * T + l.COOD-50 1.0000-50 1.000D-5C 1.000r>-50 1.493D-O3 5.6540-03 6.9200-03 1.827D-:2 2.4460-02 3.:-24D-02 4.1480-02 4. 3920-02 4.5940-02 4.76^ 4.993D-D2 4. 7600-02 4.5360-02 4.332P-02 4.142P-J2 3. 3970-32 3.173C-02 2.978C-"Z 2.8Q7r-"2 2.1*50-^2 1.3580-02 1.2KD-J2 l.r92C-"2 9.969C-C3 ?*.173D-V3 1.5950-03 1. 2210-03 SPUTTERING CCFFFICIE>4T FO? PH * l.->320- >2 1.4->3J-,i2 o.b'l ?50-03 1.5&:D- 3 5.427D---2 5.4110-'-2 1. 0000-50 1.5C7D-C2 1.0320-01 1.3870-01 9.7170-02 4.1220-02 6.1470-03* * 1. 0000-50 2.1770-03 1. 6230-02 2.2460-02 1. 5930-02 6.8290-03 1.026D-C3* *i.ooco-sn 8.7680-03 4. 5700-02 6.211D-f2 4. 4080-02 1.8930-02 2. 8500-03* *1.00CO-5C 7.2700-02 3.3710-01 4.5430-C1 3.2250-01 1.3860-01 2. 0890-02 1.0000-50 l.C000-50 l.rOOD-50 4.140D-C3 7 1.6390-02. 2.1590-02 5.v7'P-?2 6.6710-02 8 1.1C90-C1 1.1730-01 1.2250-.'! 1.2690-'! 1.442C-M 1.3260-01 1.2640-01 1.205P-01 1.1500-C1 I.IXO-H 9.0230-02 8.4270-02 7.91fD-:2 7.457C-T2 5.832P-'?2 3.6100-02 3.2170-02 2.9-:5D-"2 2.651C.-.'2 2.439C-:2 4.244C-03 3.2500-03 SPUTTERING CHEFFICIFNT f-QC &G + H4 i.oocD-5,'- i.x-vD-sr i.-jv:n-5. i.o: 2.699D-03 3.203D-"?3 7.74^n-C'3 l.?360-C2 1.2760-02 1.7500-02 1.8550-02 1.941C-C2 2.0130-C2 2.3130-02 2.1530-02 2.057D-.12 1.965^-t. 2 1.6780-C2 !.7<>dO-'.2 1.4820-02 1.385D-02 1.302P-02 1.2280-^2 S.633D-*3 5.987D-33 5.3390-03 4.6240-^3 4.404D-C3 4.^550-03 7.091D-04 5.4330-C4 SPUTTERING COEPFICIENT FOP AG * 0+ 1.00-0-5r 1.3510-03 2.9960-f3 4.337P-03 6.'.'-. 20-~? 1.0090-02 1.1370-02 2.319P-C2 3.C100-02 3.6-o CH HCD zo no m n mZ H ?fl O Oo mno 7T (D o o1*1 J- Lllill i ? i 11 IM! i 111 b4i J i iiii l o ; x J* J> O O H Zi: x ??? + + ?*? rn rn??? * 10 10 10 10 10 ENERGY (kev) H* H* COo 10 10 FIGURE 6. SPUTTERING COEFFICIENT FOR Ni 10 10 10 ENERGY 10 10 H+ H+ D+ D+ 10 FIGURE 7. SPUTTERING COEFFICIENT FOR Cu SPUTTERING COEFFICIENT OC jom po C/3 "ID GH Hm JO *??*Z Q O O n mz H m 3DCT ll i nil G | Xi II .?- ?" O O rn rn 10 ^10 10 -1 10 ENERGY 10 H+ H-f D+ i + 10 10 D ? 3HE+ 3HE+ CO GO FIGURE 9. SPUTTERING COEFFICIENT FOR Mo SPUTTERING COEFFICIENT > 0 o oJ. 4, i- A, > O CD ib A O C90 m on13 C HH tn 23 o no m?n ?n O m2: H -no m rn 3 CD N i* ft f I a x a o rn rn* + 10 1010 10-1 10 ENERGY 10 O H+ H+ D+ D+ T+ T+ 3HE* 3HE* 10 10 OJCP FIGURE 11. SPUTTERING COEFFICIENT FOR Au 10 10 10 S3 10o o o 5 10oc LU LU??t O Q_ (O 10 10 10 10 10 10 10 ENERGY (kev) 10 10 H+ H+ CO CTi FIGURE 12. SPUTTERING COEFFICIENT FOR U