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|Title:||SPUTLIB - a library of Maxwellian-averaged sputtering coefficients|
|Publisher:||Australian Atomic Energy Commission|
|Citation:||Cook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission.|
|Abstract:||A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.|
|Gov't Doc #:||171|
|Appears in Collections:||Scientific and Technical Reports|
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