SPUTLIB - a library of Maxwellian-averaged sputtering coefficients
Australian Atomic Energy Commission
A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.
Beams, Boltzmann statistics, Energy dependence, Sputtering, Scaling laws, Plasma, keV range
Cook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission.