Please use this identifier to cite or link to this item:
https://apo.ansto.gov.au/dspace/handle/10238/274| Title: | SPUTLIB - a library of Maxwellian-averaged sputtering coefficients |
| Authors: | Cook, JL Rose, EK |
| Keywords: | Beams Boltzmann statistics Energy dependence Sputtering Scaling laws Plasma keV range |
| Issue Date: | Jul-1982 |
| Publisher: | Australian Atomic Energy Commission |
| Citation: | Cook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission. |
| Abstract: | A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format. |
| Gov't Doc #: | 171 |
| URI: | http://apo.ansto.gov.au/dspace/handle/10238/274 |
| ISBN: | 0642597480 |
| Other Identifiers: | AAEC-E-541 |
| Appears in Collections: | Scientific and Technical Reports |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| AAEC-E-541.pdf | 947.99 kB | Adobe PDF |  View/Open |
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