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Title: SPUTLIB - a library of Maxwellian-averaged sputtering coefficients
Authors: Cook, JL
Rose, EK
Keywords: Beams
Boltzmann statistics
Energy dependence
Scaling laws
keV range
Issue Date: Jul-1982
Publisher: Australian Atomic Energy Commission
Citation: Cook, J. L., & Rose, E. K. (1982). SPUTLIB - a library of Maxwellian-averaged sputtering coefficients. (AAEC/E541). Lucas Heights, NSW: Research Establishment, Australian Atomic Energy Commission.
Abstract: A general law of sputtering coefficients as a function of hydrogen and helium ion energies that are incident on metallic walls is given. The average over a Maxwellian spectrum is carried out analytically. A library of such coefficients is presented in the ADL-1 format.
Gov't Doc #: 171
ISBN: 0642597480
Other Identifiers: AAEC-E-541
Appears in Collections:Scientific and Technical Reports

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